SCOPUS 정보 검색 플랫폼

Thin Solid Films

Volumn 517, Issue 5, 2009, Pages 1746-1749

Residual stress of graded-index-like films deposited by radio frequency ion-beam sputtering

(4) Tang, Chien Jen a Jaing, Cheng Chung b Wu, Kai a Lee, Cheng Chung a

a NATIONAL CENTRAL UNIVERSITY (Taiwan)

b MINGHSIN UNIVERSITY OF SCIENCE AND TECHNOLOGY (Taiwan)

Author keywords

Graded index optical filters; Radio frequency ion beam sputtering; Residual stress; Ta2O5 SiO2 composite film

Indexed keywords

COMPOSITE MATERIALS; ION BEAMS; IONS; OPTICAL FILTERS; RADIO; RADIO WAVES; RESIDUAL STRESSES; SILICON COMPOUNDS; STRENGTH OF MATERIALS; TANTALUM;

GRADED-INDEX OPTICAL FILTERS; LAYERED COMPOSITES; RADIO FREQUENCIES; RADIO FREQUENCY ION-BEAM SPUTTERING; SPUTTERING DEPOSITIONS; TA2O5-SIO2 COMPOSITE FILM;

COMPOSITE FILMS;

EID: 56949102343 PISSN: 00406090 EISSN: None Source Type: Journal
DOI: 10.1016/j.tsf.2008.09.073 Document Type: Article

Times cited : (8)

References (18)

1
- 84975597902
- Sankur H., Gunning W.J., and DeNatale J.F. Appl. Opt. 27 (1988) 1564
- (1988) Appl. Opt. , vol.27 , pp. 1564
- Sankur, H.¹ Gunning, W.J.² DeNatale, J.F.³

2
- 0011934516
- Pond B.J., DeBar J.I., Carniglia C.K., and Raj T. Appl. Opt. 28 (1989) 2800
- (1989) Appl. Opt. , vol.28 , pp. 2800
- Pond, B.J.¹ DeBar, J.I.² Carniglia, C.K.³ Raj, T.⁴

3
- 0002442097
- Cevro M. Thin Solid Films 258 (1995) 91
- (1995) Thin Solid Films , vol.258 , pp. 91
- Cevro, M.¹

4
- 0034428702
- Ryu T.U., Hahn S.H., Kim S.W., and Kim E.J. Opt. Eng. 39 (2000) 3207
- (2000) Opt. Eng. , vol.39 , pp. 3207
- Ryu, T.U.¹ Hahn, S.H.² Kim, S.W.³ Kim, E.J.⁴

5
- 33846858835
- Lee C.C., and Tang C.J. Appl. Opt. 45 (2006) 9125
- (2006) Appl. Opt. , vol.45 , pp. 9125
- Lee, C.C.¹ Tang, C.J.²

6
- 0004877721
- Feldman A., Farabaugh E.N., Haller W.K., Sanders D.M., and Stempniak R.A. J. Vac. Sci. Technol., A 4 (1986) 2969
- (1986) J. Vac. Sci. Technol., A , vol.4 , pp. 2969
- Feldman, A.¹ Farabaugh, E.N.² Haller, W.K.³ Sanders, D.M.⁴ Stempniak, R.A.⁵

7
- 0000341719
- Veszelei M., Kullman L., Granqvist C.G., von Rottkay N., and Rubin M. Appl. Opt. 37 (1998) 5993
- (1998) Appl. Opt. , vol.37 , pp. 5993
- Veszelei, M.¹ Kullman, L.² Granqvist, C.G.³ von Rottkay, N.⁴ Rubin, M.⁵

8
- 18144434436
- Ritz A. Surf. Coat. Technol. 174/175 (2003) 651
- (2003) Surf. Coat. Technol. , vol.174-175 , pp. 651
- Ritz, A.¹

9
- 33645303199
- Lee C.C., Tang C.J., and Wu J.Y. Appl. Opt. 45 (2006) 1333
- (2006) Appl. Opt. , vol.45 , pp. 1333
- Lee, C.C.¹ Tang, C.J.² Wu, J.Y.³

10
- 0036542846
- Lee C.C., Tien C.L., and Hsu J.C. Appl. Opt. 41 (2002) 2043
- (2002) Appl. Opt. , vol.41 , pp. 2043
- Lee, C.C.¹ Tien, C.L.² Hsu, J.C.³

11
- 24344471373
- Shao S., Shao J., He H., and Fan Z. Opt. Lett. 30 (2005) 2119
- (2005) Opt. Lett. , vol.30 , pp. 2119
- Shao, S.¹ Shao, J.² He, H.³ Fan, Z.⁴

12
- 0000073841
- Stoney G.G. Proc. R. Soc. Lond. Ser. A 82 (1909) 172
- (1909) Proc. R. Soc. Lond. Ser. A , vol.82 , pp. 172
- Stoney, G.G.¹

13
- 0001506559
- Winau D., Koch R., Fuhrmann A., and Rieder K.H. J. Appl. Phys. 70 (1991) 3081
- (1991) J. Appl. Phys. , vol.70 , pp. 3081
- Winau, D.¹ Koch, R.² Fuhrmann, A.³ Rieder, K.H.⁴

14
- 0040750440
- Lee C.C., Tien C.L., Sheu W.S., and Jaing C.C. Rev. Sci. Instrum. 72 (2001) 2128
- (2001) Rev. Sci. Instrum. , vol.72 , pp. 2128
- Lee, C.C.¹ Tien, C.L.² Sheu, W.S.³ Jaing, C.C.⁴

15
- 0036603503
- Kaiser N. Appl. Opt. 41 (2002) 3053
- (2002) Appl. Opt. , vol.41 , pp. 3053
- Kaiser, N.¹

16
- 0033874950
- Spaepen F. Acta mater. 48 (2000) 31
- (2000) Acta mater. , vol.48 , pp. 31
- Spaepen, F.¹

17
- 0000550211
- Seel S.C., Thompson C.V., Hearne S.J., and Floro J.A. J. Appl. Phys. 88 (2000) 7079
- (2000) J. Appl. Phys. , vol.88 , pp. 7079
- Seel, S.C.¹ Thompson, C.V.² Hearne, S.J.³ Floro, J.A.⁴

18
- 0035340248
- Floro J.A., Hearne S.J., Hunter J.A., Kotula P., Chason E., Seel S.C., and Thompson C.V. J. Appl. Phys. 89 (2001) 4886
- (2001) J. Appl. Phys. , vol.89 , pp. 4886
- Floro, J.A.¹ Hearne, S.J.² Hunter, J.A.³ Kotula, P.⁴ Chason, E.⁵ Seel, S.C.⁶ Thompson, C.V.⁷

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.