Rugate filter made with composite thin films by ion-beam sputtering

Applied Optics

Volumn 45, Issue 7, 2006, Pages 1333-1337

  Lee, Cheng Chung ^a   Tang, Chien Jen ^a   Wu, Jean Yee ^a  

^a NATIONAL CENTRAL UNIVERSITY   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

CONTROL SYSTEMS; ION BEAMS; OXIDES; SILICON; SURFACE ROUGHNESS; TANTALUM COMPOUNDS;

AUTOMATIC COMPUTER CONTROL; COMPOSITE FILMS; ION-BEAM SPUTTERING; TA-SI OXIDE;

COMPOSITE MATERIALS;

EID: 33645303199     PISSN: 1559128X     EISSN: 15394522     Source Type: Journal    
DOI: 10.1364/AO.45.001333     Document Type: Article

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