Quantitative and easy estimation of a crystal bending effect using low-order CBED patterns

Journal of Electron Microscopy

Volumn 57, Issue 6, 2008, Pages 181-187

  Yamazaki, Takashi ^a   Kashiwagi, Akihiro ^a   Kuramochi, Koji ^a   Ohtsuka, Masahiro ^a   Hashimoto, Iwao ^a   Watanabe, Kazuto ^b  

^a TOKYO UNIVERSITY OF SCIENCE   (Japan)

^b TOKYO METROPOLITAN COLLEGE OF INDUSTRIAL TECHNOLOGY   (Japan)

Author keywords

CBED; Crystal bending effect; Dynamical simulation; SiGe; Split HOLZ lines

Indexed keywords

SIGE;

ELECTRON DIFFRACTION;

BENDING EFFECT; CONVERGENT BEAM ELECTRON DIFFRACTION; CONVERGENT BEAMS; CRYSTAL BENDING EFFECT; DYNAMICAL SIMULATION; ELECTRON DIFFRACTION PATTERN; LOW ORDER; MEASUREMENTS OF; QUANTITATIVE MEASUREMENT; SPLIT HOLZ LINES;

SI-GE ALLOYS;

EID: 56549129588     PISSN: 00220744     EISSN: 14779986     Source Type: Journal    
DOI: 10.1093/jmicro/dfn019     Document Type: Article

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