Distortion measurement of multi-finger transistor using split higher-order laue zone lines analysis

Japanese Journal of Applied Physics

Volumn 47, Issue 5 PART 1, 2008, Pages 3709-3711

  Uesugi, Fumihiko ^a   Yamazaki, Takashi ^b   Kuramochi, Koji ^b   Hashimoto, Iwao ^b   Kojima, Kenji ^c   Takeno, Shiro ^c  

^a Toshiba Nanoanalysis Corporation   (Japan)

^b TOKYO UNIVERSITY OF SCIENCE   (Japan)

^c TOSHIBA CORPORATION   (Japan)

Author keywords

CBED; Distortion; Multi finger transistor; Split HOLZ lines

Indexed keywords

MATHEMATICAL MODELS;

CALCULATION METHODS; CBED; CONVERGENT BEAM ELECTRON DIFFRACTIONS; DEFORMATION MODELS; DISTORTION; DISTORTION MEASUREMENTS; EXTERNAL-; MULTI-FINGER TRANSISTOR; PRESENT METHODS; SPLIT HOLZ LINES; WELL REFLECTS;

ARSENIC;

EID: 55049101813     PISSN: 00214922     EISSN: 13474065     Source Type: Journal    
DOI: 10.1143/JJAP.47.3709     Document Type: Article

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