Thermal contact calibration between a thermocouple probe and a microhotplate

Journal of Heat Transfer

Volumn 130, Issue 9, 2008, Pages

  Thiery, Laurent ^a   Toullier, S ^a   Teyssieux, D ^a   Briand, D ^b  

^a FEMTO ST INSTITUTE   (France)

^b Institute for Microtechnology   (Switzerland)

Author keywords

Calibration; Contact resistance; Microhotplate; Thermal probes; Thermocouple

Indexed keywords

THERMAL EFFECTS; THERMOCOUPLES; THERMOMETERS;

CANTILEVER PROBES; CONTACT MECHANISMS; MICRO HOT PLATES; MICROHOTPLATE; NANOSCALE LEVELS; NEAR FIELDS; QUANTITATIVE MEASUREMENTS; THERMAL PROBES; THERMAL PROBING; THERMAL RESISTANCES; TRANSPORT PHENOMENONS;

CALIBRATION;

EID: 56449113255     PISSN: 00221481     EISSN: 15288943     Source Type: Journal    
DOI: 10.1115/1.2943306     Document Type: Article

References (19)

1. Sarro, P. M., Van Herwaarden, A. W., and Van der Vlist, W., 1994, "Silicon-Silicon Nitride Membrane Fabrication Process for Smart Thermal Sensors," Sens. Actuators, A. 42, pp. 666-671.
2. Simon, I., Barsan, N., Bauer, M., and Weimar, U., 2001, "Micromachined Metal Oxide Gas Sensors: Opportunities to Improve Sensor Performance," Sens. Actuators B, 73, pp. 1-26.
3. Rossi, C., Briand, D., Dumonteuil, M., Camps, T., Pham, P. Q., and De Rooij, N. F., 2006, "Matrix of 10×10 Addressed Solid Propellant Microthrusters: Review of the Technologies," Sens. Actuators, A, 126, pp. 241-252.
4. Konz, W., Hildenbrand, J., Bauersfeld, M., Hartwig, S., Lambrecht, A., Lehmann, V., and Wöllenstein, J., 2005, "Micromachined IR Source With Excellent Blackbody Like Behaviour," Proc. SPIE, 5836, pp. 540-548.
5. Altet, J., Dilhaire, S., Volz, S., Rampnoux, J. M., Rubio, A., Granby, S., Patino Lopez, L. D., Claeys, W., and Saulnier, J. B., 2002, "Four Different Approaches for the Measurement of IC Surface Temperature: Application to Thermal Testing," Microelectron. J., 33, pp. 689-696.
6. Serrano, J. R., Phinney, L. M., and Kearney, S. P., 2006, "Micro-Raman Thermometry of Thermal Flexure Actuators," J. Micromech. Microeng., 16, pp. 1128-1134.
7. Jungen, A., Stampfer, C., and Hierold, C., 2006, "Thermography on a Suspended Microbridge Using Confocal Raman Scattering," Appl. Phys. Lett., 88, 191901-3.
8. Abel, M. R., and Graham, S., 2007, "Raman Thermometry of Polysilicon Microelectro-Mechanical Systems in the Presence of an Evolving Stress," ASME J. Heat Transfer, 129, pp. 329-334.
9. Majumdar, A., 1999, "Scanning Thermal Microscopy," Annu. Rev. Mater. Sci., 29, pp. 505-585.
10. Briand, D., Krauss, A., van der Schoot, B., Weimar, U., Barsan, N., Göpel, W., and de Rooij, N. F., 2000, "Design and Fabrication of High Temperature Micro-Hotplates for Drop-Coated Gas Sensors," Sens. Actuators B, 68, pp. 223-233.
11. Briand, D., Heimgartner, S., Gretillat, M. A., Van Der Schoot, B., and De Rooij, N. F., 2002, "Thermal Optimization of Micro-Hotplates That Have a Silicon Island," J. Micromech. Microeng., 12, pp. 971-978.
12. Voisin, P., Thiery, L., and Bröm, G., 1999, "Exploration of the Atmospheric Lower Layer Thermal Turbulences by Means of Microthermocouples," Eur. Phys. J.: Appl. Phys., 7(2), pp. 177-187.
13. Thiery, L., Porcar, R., and Prenel, J. P., 1994, "Performance Limits of Microthermocouples as Opto-Thermal Sensors," Opt. Commun., 107, pp. 309-317.
14. Thiery, L., Marini, N., Prenel, J. P., Spajer, M., Bainier, C., and Courjon, D., 2000, "Temperature Profile Measurements of Near-Field Optical Microscopy Fiber Tips by Means of Sub-Micronic Thermocouple," Int. J. Therm. Sci., 39, pp. 519-525.
15. Majumdar, A., Carrejo, J. P., and Lai, J., 1993,"Thermal Imaging Using the Atomic Force Microscope," Appl. Phys. Lett., 62(20), pp. 2501-2503.
16. Shi, L., and Majumdar, A., 2002, "Thermal Transport Mechanisms at Nanoscale Point Contacts," ASME J. Heat Transfer, 124, pp. 329-332.
17. Gomes, S., Trannoy, N., and Grossel, P., 1999, "DC Thermal Microscopy: Study of the Thermal Exchange Between a Probe and a Sample," Meas. Sci. Technol., 10, pp. 805-811.
18. Lefevre, S., Volz, S., and Chapuis, P. O., 2006, "Nanoscale Heat Transfer at Contact Between a Hot Tip and a Substrate," Int. J. Heat Mass Transfer, 49, pp. 251-258.
19. Shi, L., Kwon, O., Miner, A., and Majumdar, A., 2001, "Design and Batch Fabrication of Probes for Sub-100 nm Scanning Thermal Microscopy," J. Microelectromech. Syst., 10, pp. 370-378.