Parallel-local anodic oxidation of silicon surfaces by soft stamps

Nanotechnology

Volumn 19, Issue 43, 2008, Pages

  Albonetti, Cristiano ^a   Martinez, Javier ^b   Losilla, Nuria S ^b   Greco, Pierpaolo ^a   Cavallini, Massimiliano ^a   Borgatti, Francesco ^a   Montecchi, Monica ^c   Pasquali, Luca ^c   Garcia, Ricardo ^b   Biscarini, Fabio ^a  

^a CNR   (Italy)

^b INSTITUTO DE MICROELECTRÓNICA DE MADRID   (Spain)

^c UNIVERSITY OF MODENA AND REGGIO EMILIA   (Italy)

Author keywords

[No Author keywords available]

Indexed keywords

ATMOSPHERIC HUMIDITY; CHEMICAL OXYGEN DEMAND; FINITE ELEMENT METHOD; HUMIDITY CONTROL; METEOROLOGY; MOISTURE; MOS CAPACITORS; MOTOR BOATS; NANOSTRUCTURED MATERIALS; NANOSTRUCTURES; NONMETALS; OXIDATION; SILICA; SILICON COMPOUNDS; SILICONES;

ATOMIC FORCES; COMPLEX NANOSTRUCTURES; CONFORMAL CONTACTS; FINITE ELEMENT ANALYSIS; LENGTH SCALES; LOCAL ANODIC OXIDATIONS; NANOMETRIC; OXIDATION MECHANISMS; OXIDE NANOSTRUCTURES; POLYDIMETHYLSILOXANE STAMPS; RELATIVE HUMIDITIES; REPRODUCIBILITY; SEALED CHAMBERS; SILICON OXIDE NANOSTRUCTURES; SILICON SURFACES; SOFT STAMPS; UNDERLYING MECHANISMS;

ANODIC OXIDATION;

DIMETICONE; NANOMATERIAL; SILICON;

ARTICLE; CHEMICAL STRUCTURE; CONTROLLED STUDY; ELECTRIC POTENTIAL; HUMIDITY; NANOFABRICATION; OXIDATION; PARALLEL DESIGN; PRIORITY JOURNAL; SURFACE PROPERTY;

EID: 56349143451     PISSN: 09574484     EISSN: 13616528     Source Type: Journal    
DOI: 10.1088/0957-4484/19/43/435303     Document Type: Article

References (32)

1. Pliskin W A 1977 J. Vac. Sci. Technol. 14 1064-81
2. Jain G C, Prasad A and Chakravarty B C 1979 J. Electrochem. Soc. 126 89-92
3. Hung T F, Wong H, Cheng Y C and Pun C K 1991 J. Electrochem. Soc. 138 3747-50
4. Bardwell J A, Clark K B, Mitchell D F, Bisaillion D A, Sproule G I, MacDougall B and Graham M J 1993 J. Electrochem. Soc. 140 2135-8
5. Landheer D, Bardwell J A and Clark K B 1994 J. Electrochem. Soc. 141 1309-12
6. Clark K B, Bardwell J A and Baribeau J M 1994 J. Appl. Phys. 76 3114-22
7. Sze S M 1981 Physics of Semiconductors Devices (New York: Wiley)
8. Mende G, Hensel E, Fenski F and Flietner H 1989 Thin Solid Films 168 51-60
9. Morfouli P and Pananakakis G 1989 Phys. Status Solidi a 111 529-39
10. Ohnishi K, Ito A, Takahashi Y and Miyazaki S 2002 Japan. J. Appl. Phys. 41 1235-40
11. Bensliman F, Fukuda A, Mizuta N and Matsumura M 2003 J. Electrochem. Soc. 150 G527-31
12. Buttard D, Krieg C and Fournel F 2006 Surf. Sci. 600 4923-30
13. Nadji B 2007 J. Mater. Proc. Technol. 181 230-4
14. Calleja M, Anguita J, Garcia R, Birkelund K, Perez-Murano F and Dagata J A 1999 Nanotechnology 10 34-8
15. Garcia R, Martinez R V and Martinez J 2006 Chem. Soc. Rev. 35 29-38
16. Johannes M S, Cole D G and Clark R L 2007 Nanotechnology 18 345304
17. Kuramochi H, Ando K, Tokizaki T and Yokoyama H 2004 Appl. Phys. Lett. 84 4005-7
18. Xie X N, Chung H J, Liu Z J, Yang S W, Sow C H and Wee A T S 2007 Adv. Mater. 19 2618-23
19. Garcia R, Tello M, Moulin J F and Biscarini F 2004 Nano Lett. 4 1115-19
20. Jacobs H O and Whitesides G M 2001 Science 291 1763-66
21. Jacobs H O and Whitesides G M 2002 Patent Title: Electric Microcontact Printing Method and Apparatus Pub. No.: WO/2002/003142, International Application No.: PCT/US2001/021151
22. Mühl T, Kretz J, Mönch I, Schneider C M, Brückl H and Reiss G 2000 Appl. Phys. Lett. 76 786-8
23. Cavallini M, Mei P, Biscarini F and Garcia R 2003 Appl. Phys. Lett. 83 5286-88
24. Martinez J, Losilla N S, Biscarini F, Schmidt G, Borzenko T, Molenkamp L W and Garcia R 2006 Rev. Sci. Instrum. 77 086106
25. Cavallini M et al 2005 Nano Lett. 5 2422-25
26. Ghowsi K and Gale R J 1989 J. Electrochem. Soc. 136 867-71
27. Yegingil H, Shih W Y and Shih W-H 2007 J. Appl. Phys. 101 054510
28. Martinez R V, Losilla N S, Martinez J, Tello M and Garcia R 2007 Nanotechnology 18 084021
29. Himpsel F J, McFeely F R, Taleb-Ibrahimi A, Yarmoff J A and Hollinger G 1988 Phys. Rev. B 38 6084-96
30. Podariu I and Chakrabarti A 2000 J. Chem. Phys. 113 6423-28
31. Salvadori M C, Vaz A R, Melo L L and Cattani M 2003 Surf. Rev. Lett. 10 571-5
32. Innocenti M, Cattarin S, Cavallini M, Loglio F and Foresti M L 2002 J. Electroanal. Chem. 532 219-25