Evolution of the texture of TiN films prepared by fittered arc deposition

Journal of Applied Physics

Volumn 79, Issue 12, 1996, Pages 9399-9401

  Zhao, J P ^a   Wang, X ^a   Shi, T S ^a   Liu, X H ^a  

^a SHANGHAI INSTITUTE OF MICROSYSTEM AND INFORMATION TECHNOLOGY   (China)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000139828     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.362576     Document Type: Article

References (10)

1. I. Petroy, L. Hultman, U. Helmersson, and J.-E. Sundgren, Thin Solid Films 159, 299 (1989).
2. J.-E. Sundgren, Thin Solid Films 128, 21 (1985).
3. J. I. Jeong, J. H. Hong, J. S. Kang, H. J. Shin, and Y. P. Lee, J. Vac. Sci. Technol. A 9, 2618 (1991).
4. J. P. Zhao, X. Wang, T. S. Shi, and X. H. Liu (to be published).
5. G. Knuyt, C. Quacyhaegens, J. D'Haen, and L. M. Stals, Thin Solid Films 258, 159 (1995).
6. C. Quacyhaegens, G. Knuyt, J. D'Haen, and L. M. Stals, Thin Solid Films 258, 170 (1995).
7. D. S. Rickerby, A. M. Jones, and B. A. Bellamy, Surf. Coat. Technol. 37, 4375 (1989).
8. J. E. Greene, S. A. Barnett, J.-E. Sundgren, and A. Rockett, in Plasma-Surface Interactions and Processing of Materials (Kluwer, Dordrecht, 1990), p. 281.
9. L. Hultman, W.-D. Munz, J. Musil, S. Kadlec, I. Petrov, and J. E. Greene, J. Vac. Sci. Technol. A 9, 434 (1991).
10. J. Pelleg, L. Z. Zevin, S. Lungo, and N. Croitoru, Thin Solid Films 197, 117 (1991).