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Volumn 93, Issue 19, 2008, Pages
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20-nm-gate-length erbium-/platinum-silicided n-/ p-type Schottky barrier metal-oxide-semiconductor field-effect transistors
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Author keywords
[No Author keywords available]
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Indexed keywords
DIELECTRIC DEVICES;
ELECTRIC CONDUCTIVITY;
ERBIUM;
FIELD EFFECT TRANSISTORS;
ION BEAMS;
LEAKAGE CURRENTS;
PLATINUM;
PLATINUM METALS;
SCHOTTKY BARRIER DIODES;
SEMICONDUCTOR MATERIALS;
SILICIDES;
SUGAR (SUCROSE);
TRANSISTORS;
AND GATES;
CHANNEL REGIONS;
MOS FETS;
ON/OFF CURRENT RATIOS;
SATURATION CURRENTS;
SCHOTTKY BARRIER METALS;
SCHOTTKY BARRIERS;
SEMI-CONDUCTORS;
MOSFET DEVICES;
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EID: 56249089326
PISSN: 00036951
EISSN: None
Source Type: Journal
DOI: 10.1063/1.3025726 Document Type: Article |
Times cited : (11)
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References (11)
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