Development of dark Ti(C,O,N) coatings prepared by reactive sputtering

Surface and Coatings Technology

Volumn 203, Issue 5-7, 2008, Pages 804-807

  Chappe J M ^a   Vaz, F ^a   Cunha, L ^a   Moura, C ^a   Marco de Lucas, M C ^b   Imhoff, L ^b   Bourgeois, S ^b   Pierson, J F ^c  

^a UNIVERSITY OF MINHO   (Portugal)

^b LABORATOIRE INTERDISCIPLINAIRE CARNOT DE BOURGOGNE   (France)

^c INSTITUT JEAN LAMOUR   (France)

Author keywords

Decorative properties; Reactive sputtering; Structure; Titanium oxycarbonitride

Indexed keywords

ACETYLENE; COLOR; ELECTROMAGNETIC WAVES; ELECTRON PROBE MICROANALYSIS; FLOW RATE; LIGHTING; MICROANALYSIS; NONMETALS; OPTICAL PROPERTIES; OXYGEN; REACTIVE SPUTTERING; SEMICONDUCTING SILICON COMPOUNDS; SILICON; SPACE PROBES; THICK FILMS; TITANIUM;

ACCURATE CONTROLS; APPLICATIONS.; COLOUR SPACES; COMPOSITION ANALYSIS; DECORATIVE PROPERTIES; DEPOSITION CHAMBERS; DEPOSITION PARAMETERS; DIRECT CURRENTS; FCC STRUCTURES; FILM STRUCTURES; METALLOID CONCENTRATIONS; REACTIVE GAS MIXTURES; REACTIVE MAGNETRON SPUTTERING; SILICON SUBSTRATES; SPECTRAL REFLECTANCES; STRUCTURE; TITANIUM TARGETS; X-RAY DIFFRACTIONS;

MAGNETRON SPUTTERING;

EID: 55749113210     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.surfcoat.2008.05.039     Document Type: Article

References (16)

1. Lousa A., Esteve J., Mejia J.P., and Devia A. Vacuum 81 (2007) 1507
2. Aravinda C.L., Bera P., Jayaram V., Sharma A.K., and Mayanna S.M. Mater. Res. Bull. 37 (2002) 397
3. Cui G., Li N., Li D., Zheng J., and Wu Q. Surf. Coat. Technol. 200 (2006) 6808
4. Hollstein F., and Louda P. Surf. Coat. Technol. 120-121 (1999) 672
5. Stüber M., Ulrich S., Leiste H., Kratzsch A., and Holleck H. Surf. Coat. Technol. 116-119 (1999) 591
6. Stanishevsky A., and Lappalainen R. Surf. Coat. Technol. 123 (2000) 101
7. Sobiecki J.R., Mankowski P., and Wierzchon T. Vacuum 68 (2003) 105
8. Hsieh J.H., Wu W., Li C., Yu C.H., and Tan B.H. Surf. Coat. Technol. 163-164 (2003) 233
9. Matsuda Y., Otomo K., and Fujiyama H. Thin Solid Films 390 (2001) 59
10. Martin N., and Rousselot C. Surf. Coat. Technol. 157 (2002) 138
11. Rauch J.Y., Rousselot C., and Martin N. Surf. Coat. Technol. 114 (1999) 235
12. Martin N., Banakh O., Santo A.M.E., Springer S., Sanjinès R., Takadoum J., and Lévy F. Appl. Surf. Sci. 185 (2001) 123
13. Guillot J., Chappé J.M., Heintz O., Martin N., Imhoff L., and Takadoum J. Acta Mater. 54 (2006) 3067
14. Chappé J.M., Martin N., Terwagne G., Lintymer J., Gavoille J., and Takadoum J. Thin Solid Films 440 (2003) 66
15. Chappé J.M., Martin N., Lintymer J., Sthal F., Terwagne G., and Takadoum J. Appl. Surf. Sci. 253 (2007) 5312
16. Fernandes A.C., Vaz F., Cunha L., Parreira N.M.G., Cavaleiro A., Goudeau Ph., Le Bourhis E., Rivière J.P., Munteanu D., Borcea B., and Cozma R. Thin Solid Films 515 (2007) 5424