Increased wear and corrosion resistance of Ti(NCO) layers by annealing in a nitrogen plasma atmosphere

Vacuum

Volumn 68, Issue 2, 2002, Pages 105-111

  Sobiecki, J R ^a   Mankowski P ^a   Wierzchon T ^a  

^a WARSAW UNIVERSITY OF TECHNOLOGY   (Poland)

Author keywords

Lattice parameter; PACVD method; Tetraisopropoxytitanium; Titanium oxycarbonitride

Indexed keywords

ANNEALING; CHEMICAL VAPOR DEPOSITION; CORROSION RESISTANCE; CRYSTALLOGRAPHY; MICROHARDNESS; NITROGEN; PLASMA APPLICATIONS; SCANNING ELECTRON MICROSCOPY; STOICHIOMETRY; THERMAL EFFECTS; WEAR RESISTANCE; X RAY DIFFRACTION ANALYSIS;

PLASMA NITRIDING TREATMENT;

TITANIUM COMPOUNDS;

EID: 0037206617     PISSN: 0042207X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0042-207X(02)00293-2     Document Type: Article

References (11)

1. Rie K.T., Gebauer A. J Mater Sci Eng. A139:1991;61.
2. Stock H.R., Mayr P. J Vac Sci Technol. A4(6):1986;221.
3. Wierzchoń T., Sobiecki J.R. Vacuum. 44:1993;975.
4. Sadahiro T., Tamaya S., Shibuki K., Ujie N. Wear. 8:1978;291.
5. Zhang Q., Griffin G.L. Thin Solid Films. 263:1995;65.
6. Eun K.K., Maeng H.S., Suk-Ki M., Han Y.K., Wang C.H., Yom S.S. J Appl Phys. 79:1996;4459.
7. Weber A., Pockelman R., Klages C.P. Appl Phys Lett. 67:1996;2934.
8. Yulong S., Hongrui P., Yan X., Guangwen X., Cheng Z., Shizi L. Surf Coatings Technol. 132:2000;26.
9. Holleck H. Binare und ternare Carbid- und Nitridsysteme der Ubergansmetalle, 1984.
10. Murray J.L., Wriedt H.A. Bull Alloy Phase Diagrams. 8:1987;148.
11. Polish Standard PN-83/ H-04302, 1983.