Influence of deposition pressure on the structural mechanical and decorative properties of TiN thin films deposited by cathodic arc evaporation

Vacuum

Volumn 81, Issue 11-12, 2007, Pages 1507-1510

  Lousa, A ^a   Esteve, J ^a   Mejia, J P ^b   Devia, A ^b  

^a UNIVERSITY OF BARCELONA   (Spain)

^b UNIVERSIDAD NACIONAL DE COLOMBIA   (Colombia)

Author keywords

Cathodic arc; Color coordinates; Hard coatings; Hardness; Titanium nitride

Indexed keywords

CATHODES; DEPOSITION; EVAPORATION; HARD COATINGS; HARDNESS; TITANIUM NITRIDE;

CATHODIC ARCS; COLOR COORDINATES; DEPOSITION PRESSURES;

THIN FILMS;

EID: 34547865356     PISSN: 0042207X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.vacuum.2007.04.017     Document Type: Article

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