SCOPUS 정보 검색 플랫폼

Surface and Coatings Technology

Volumn 114, Issue 2-3, 1999, Pages 235-249

Modelling of reactive sputtering processes involving two separated metallic targets

(2) Martin, Nicolas a Rousselot, Christophe a

a UNIVERSITÉ DE FRANCHE COMTÉ (France)

Author keywords

Instability; Modelling; Multitarget; Oxide multilayers; Reactive sputtering

Indexed keywords

CHROMIUM; MATHEMATICAL MODELS; MULTILAYERS; OXYGEN; TITANIUM;

OXIDE MULTILAYERS; REACTIVE SPUTTERING;

SPUTTERING;

EID: 0032653113 PISSN: 02578972 EISSN: None Source Type: Journal
DOI: 10.1016/S0257-8972(99)00051-1 Document Type: Article

Times cited : (18)

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