A low power MEMS gas sensor based on nanocrystalline ZnO thin films for sensing methane

Microelectronics Reliability

Volumn 48, Issue 11-12, 2008, Pages 1772-1779

  Bhattacharyya, P ^a   Basu, P K ^b   Mondal, B ^b   Saha, H ^b  

^a INDIAN INSTITUTE OF ENGINEERING SCIENCE AND TECHNOLOGY   (India)

^b JADAVPUR UNIVERSITY   (India)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRIC POWER UTILIZATION; METHANATION; METHANE; NANOCRYSTALLINE ALLOYS; NANOCRYSTALLINE MATERIALS; NANOCRYSTALLINE SILICON; NANOSTRUCTURED MATERIALS; SEMICONDUCTING SILICON COMPOUNDS; SEMICONDUCTING ZINC COMPOUNDS; SILICON; THICK FILMS; ZINC ALLOYS; ZINC OXIDE;

AND RECOVERIES; EFFICIENT DETECTIONS; FAST RESPONSE TIMES; FAST RESPONSES; GAS SENSORS; HIGH RESPONSES; IC TECHNOLOGIES; LOW POWERS; METHANE CONCENTRATIONS; MICROMACHINED; MICROMACHINED SENSORS; MICROMACHINED SILICONS; NANOCRYSTALLINE ZNO; OF SENSORS; OPERATING TEMPERATURES; OPTIMUM TEMPERATURES; POWER CONSUMPTIONS; RESPONSE MAGNITUDES; RESPONSE TIMES;

SENSORS;

EID: 55649091825     PISSN: 00262714     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.microrel.2008.07.063     Document Type: Article

References (26)

1. Chatterjee K., Chatterjee S., Banerjee A., Raut M., Pal N.C., Sen A., et al. The effect of palladium incorporation on methane sensitivity of antimony doped tin oxide. Mater Chem Phys 81 (2003) 33-38
2. 2 sensors. Sensors Actuators B 78 (2001) 64-68
3. Kohl D. Function and application of gas sensors. J Phys D: Appl Phys 34 (2001) R125-R149
4. Figaro Products Catalogue, Figaro gas sensors 2000-series, Figaro Engineering Inc., European Office, Oststrasse 10, 40211 Dusseldorf, Germany.
5. Mitzner K.D., Strnhagen J., and Glipeau D.N. Development of micromachined hazardous gas sensor array. Sensors Actuators B 93 (2003) 92-99
6. Suehle J.S., Cavicchi R.E., Gaitan M., and Semancik S. Tin oxide gas sensor fabricated using CMOS micro-hotplates and in situ processing. IEEE Electron Dev Lett 14 3 (1993) 118-120
7. Semancik S, Cavicchi RE, Gaitan M, Suehle JS, US Patent 1994;5:345,213.
8. Salcedo J.A., Juin J.L., Afridi M.Y., and Hefner A.R. On-chip electrostatic discharge protection for CMOS gas sensor systems-on-a-chip (SoC). Microelectron Reliab 46 (2006) 1285-1294
9. Lafontan X., Pressecq F., Beaudoin F., Rigo S., Dardalhon M., Roux J.L., et al. The advent of MEMS in space. Microelectron Reliab 43 7 (2003) 1061-1083
10. Comini E., Faglia G., Sberveglieri G., Pan Z., and Wag Z.L. Stable and highly sensitive gas sensors based on semiconducting oxide nanobelts. Appl Phys Lett 81 (2002) 1869-1871
11. Bhattacharyya P., Basu P.K., Saha H., and Basu S. Fast response methane sensor using nanocrystalline zinc oxide thin films derived by sol-gel method. Sensors Actuators B 124 (2007) 62-67
12. Fau P., Sauvan M., Trautweiler S., Nayrel C., Erades L., Maisonat A., et al. Nanosized tinoxide sensitive layer on a silicon platform for domestic gas application. Sensors Actuators B 78 (2001) 83-88
13. Mitzner K.D., Sternhagen J., and Galipeau D.W. Development of a micromachined hazardous gas sensor array. Sensors Actuators B 93 (2003) 92-99
14. 4 sensing. Sensors Actuators B 109 (2005) 185-189
15. Cane C., Gracia I., Gotz A., Fonseca L., Tamay E.L., Horrillo M.C., et al. Detection of gases with arrays of micromachined tin oxide gas sensors. Sensors Actuators B 65 (2000) 244-246
16. Hassani F., Tigli O., Ahmadi S., Korman C., and Zaghloul. Integrated CMOS surface acoustic wave gas sensor: design and characteristics. Proc IEEE Sensors 2 (2003) 1199-1202
17. Wan Q., Li Q.H., Chen Y.J., Wang T.H., He X.L., Li J.P., et al. Fabrication and ethanol sensing characteristics of ZnO nanowire gas sensors. Appl Phys Lett 84 (2004) 3654-3656
18. Lee S.M., Dyer D.C., and Gardner J.W. Design and optimisation of a high-temperature silicon micro-hotplate for nanoporous palladium pellistors. Microelectron J 43 (2003) 115-126
19. Puigcrobe J., Vogel D., Michel B., Vila A., Gracia I., Cane C., et al. Thermal and mechanical analysis of micromachined gas sensors. J Micromech Microeng 13 (2003) 548-556
20. Chung W., Shim C., Choi S., and Lee D. Tin oxide microsensor for LPG monitoring. Sensors Actuators B 20 (1994) 139-143
21. Rossi C., Scheid E., and Esteve D. Theoretical and experimental study of silicon micromachined microheater with dielectric stacked membranes. Sensors Actuators A 63 (1997) 183-189
22. Gotz A., Gracia I., Cane C., Lora-Tamayo E., Horrilo M.C., Getino J., et al. A micromachined solid state integrated gas sensor for the detection of aromatic hydrocarbons. Sensors Actuators B 44 (1997) 483-487
23. Nunes P., Fortunato E., Lopes A., and Martins R. Influence of the deposition conditions on the gas sensitivity of zinc oxide thin films deposited by spray pyrolysis. Int J Inorg Mater 3 (2001) 1129-1131
24. Sheng L.Y., Tang Z., Wu J.P., Chan C.H., and Sin J.K.O. A low-power CMOS compatible integrated gas sensor using maskless tin oxide sputtering. Sensors Actuators B 49 (1998) 81-87
25. x membrane for microheater applications. Sensors Actuators A 64 (1998) 241-245
26. 2. Surf Sci 86 (1979) 335-344