Integrated CMOS Surface Acoustic Wave Gas Sensor: Design and Characteristics

Proceedings of IEEE Sensors

Volumn 2, Issue 2, 2003, Pages 1199-1202

  Hassani, Farid ^a   Tigli, Onur ^a   Ahmadi, Shahrokh ^a   Korman, Can ^a   Zaghloul, Mona ^a  

^a George Washington University   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

INPUT INTERDIGITAL TRANSDUCERS (IDT); SURFACE ACOUSTIC WAVE GAS SENSORS;

ACOUSTIC SURFACE WAVE DEVICES; CMOS INTEGRATED CIRCUITS; COMPUTER SIMULATION; ELECTROCHEMICAL ELECTRODES; EQUIVALENT CIRCUITS; MICROELECTROMECHANICAL DEVICES; MICROPROCESSOR CHIPS; PIEZOELECTRIC DEVICES; POLYSILICON; X RAY DIFFRACTION ANALYSIS; ZINC OXIDE;

CHEMICAL SENSORS;

EID: 1542303484     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (4)

1. D. S. Ballantine, R. M. White, S. J. Martin, A. J. Ricco, E. T. Zellers, G. C. Frye, H. Wohltjen, Acoustic Wave Sensors: Theory, Design, and Physico-Chemical Applications, Academic Press, New York, 1997.
2. C. Campbell, "Surface Acoustic Wave Devices and Their Signal Processing Applications", Academic Press, San Diego, 1989.
3. W.R. Smith, H.M. Gerard, J.H. Collins, T.M. Reeder, H.J. Shaw, "Analysis of interdigital surface wave transducer by use of an equivalent circuit model", IEEE Trans. MTT, vol. 17, 1969, pp. 856-864.
4. M.S. Nieuwenhuizen and A. Venema, "Sensors and Materials", Delft University, The Netherlands, 1989.