Metrology in a scanning electron microscope: Theoretical developments and experimental validation

Measurement Science and Technology

Volumn 17, Issue 10, 2006, Pages 2613-2622

  Sutton, Michael A ^a   Li, Ning ^a   Garcia, Dorian ^b   Cornille, Nicolas ^c   Orteu, Jean Jose ^c   McNeill, Stephen R ^a   Schreier, Hubert W ^b   Li, Xiaodong ^a  

^a University of South Carolina   (United States)

^b Correlated Solutions Inc ^*  (United States)

^c ECOLE DES MINES D ALBI CARMAUX   (France)

Author keywords

Digital image correlation; Drift distortion removal; Full field displacement measurement; Images; Scanning electron microscope; Spatial distortion removal

Indexed keywords

COMPUTER SIMULATION; IMAGE ANALYSIS; MATHEMATICAL MODELS; MEASUREMENT THEORY; NUMERICAL ANALYSIS; PLASTIC DEFORMATION;

DIGITAL IMAGES; DRIFT DISTORTION; FULL FIELD DISPLACEMENT; SPATIAL DISTORTION;

SCANNING ELECTRON MICROSCOPY;

COMPUTER SIMULATION; IMAGE ANALYSIS; MATHEMATICAL MODELS; MEASUREMENT THEORY; NUMERICAL ANALYSIS; PLASTIC DEFORMATION; SCANNING ELECTRON MICROSCOPY;

EID: 33749034739     PISSN: 09570233     EISSN: 13616501     Source Type: Journal    
DOI: 10.1088/0957-0233/17/10/012     Document Type: Article

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