Molecular-controlled fracture and release of templated nanoporous organosilicate thin films

Advanced Materials

Volumn 20, Issue 16, 2008, Pages 3159-3164

  Ong, Markus D ^a   Volksen, Willi ^b   Dubois, Geraud ^b   Lee, Victor ^b   Brock, Phillip J ^b   Deline, Vaughn R ^b   Miller, Robert D ^b   Dauskardt, Reinhold H ^a  

^a Stanford University   (United States)

^b IBM ALMADEN RESEARCH CENTER   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

AROMATIC HYDROCARBONS; CONCENTRATION (PROCESS); DISSOLUTION; ETHERS; ETHYLENE; FRACTURE; GLYCOLS; MESOPOROUS MATERIALS; ORGANIC COMPOUNDS; POLYETHYLENE GLYCOLS; POLYETHYLENE OXIDES; POLYSTYRENES; PROPYLENE; SEMICONDUCTING SILICON COMPOUNDS; SILICON; THICK FILMS; THIN FILMS; XYLENE;

CONTROLLED FRACTURES; EQUIVALENT CONCENTRATIONS; FRACTURE PROPERTIES; NANOPOROUS ORGANOSILICATE THIN FILMS; ORGANOSILICATE; ORGANOSILICATE FILMS; ORGANOSILICATE THIN FILMS; POLY(ETHYLENE GLYCOL); POLYSTYRENE PARTICLES; POROGEN; PROPYLENE GLYCOL METHYL ETHERS; PROPYLENE GLYCOLS; SI SUBSTRATES; SYRINGE FILTERS; TEFLON MEMBRANES; TEMPLATED; TEMPLATING;

ETHYLENE GLYCOL;

EID: 54949113670     PISSN: 09359648     EISSN: None     Source Type: Journal    
DOI: 10.1002/adma.200702665     Document Type: Article

References (25)

1. D. A. Maidenberg, W. Volksen, R. D. Miller, R. H. Dauskardt, Nat. Mater. 2004, 3, 464.
2. E. P. Guyer, M. Patz, R. H. Dauskardt, J. Mater. Res. 2006, 21, 882.
3. E. P. Guyer, R. H. Dauskardt, Nat. Mater. 2004, 3, 53.
4. F. lacopi, M. Patz, I. Vos, Z. Tokei, B. Sijmus, Q. T. Le, E. Sleeckx, B. Eyckens, H. Struyf, A. Das, K. Maex, Microelectron. Eng. 2003, 70, 293.
5. J. L. Hedrick, R. D. Miller, C. J. Hawker, K. R. Carter, W. Volksen, D. Y. Yoon, M. Trollsas, Adv. Mater. 1998, 10, 1049.
6. C. V. Nguyen, K. R. Carter, C. J. Hawker, J. L. Hedrick, R. L. Jaffe, R. D. Miller, J. F. Remenar, H. W. Rhee, P. M. Rice, M. F. Toney, M. Trollsas, D. Y. Yoon, Chem. Mater. 1999, 11, 3080.
7. T. A. Desai, D. J. Hansford, L. Leoni, M. Essenpreis, M. Ferrari, Biosens. Bioelectron. 2000, 15, 453.
8. A. K. Cheetham, G. Ferey, T. Loiseau, Angew. Chem. Int. Ed. 1999, 38, 3268.
9. K. M. Coakley, M. D. McGehee, Appl. Phys. Lett. 2003, 83, 3380.
10. M. Bruel, Nucl. Instrum. Methods B 1996, 108, 313.
11. M. Bruel, B. Aspar, A. J. AubertonHerve, Jpn. J. Appl. Phys., Part 1 1997, 36, 1636.
12. D. J. Resnick, D. P. Mancini, S. V. Sreenivasan, C. G. Willson, Semicond. Int. 2002, 25, 71.
13. K.S. Chen, I. K. Lin, F. H. Ko, J. Micromech. Microeng. 2005, 15, 1894.
14. M. Konagai, M. Sugimoto, K. Takahashi, J. Cryst. Growth 1978, 45, 277.
15. Spin-On Dielectric Materials, (Eds: G. Dubois, W, Volksen, R. D. Miller), Wiley, New York 2007, pp. 33-38.
16. R. D. Miller, W. Volksen, V. Y. Lee, E. Connor, T. Magbitang, R. Zafran, L. Sundberg, C. J. Hawker, J. L. Hedrick, E. Huang, M. Toney, Q. R. Huang, C. W. Frank, H. C. Kim, ACS Symp. Ser. 2004, 874, 144.
17. M. K. Gallagher, Y. You, US Patent 6667147 2003.
18. T. J. Dalton, US Patent 6541717 2002.
19. M. D. Ong, V. Jousseaume, S. Maitrejean, R. H. Dauskardt, Mater. Res. Soc. Symp. Proc. 2006, 914. F4.7.
20. J. G. Zwissler, M. A. Adams, Am. Ceram. Soc. Bull 1981, 60, 410.
21. A. G. Evans, K. T. Faber, J. Am. Ceram. Soc. 1981, 64, 394.
22. A. G. Evans, K. T. Faber, J. Am. Ceram. Soc. 1984, 67, 255.
23. M. Sherwood, W. Volksen, G. Dubois, R. D. Miller, unpublished.
24. P. G. Charalambides, J. Lund, A. G. Evans, R. M. McMeeking, J. Appl. Mech. 1989, 56, 77.
25. R. H. Dauskardt, M. Lane, Q. Ma, N. Krishna, Eng. Fract. Mech. 1998, 61, 141.