Nanoporous, low-dielectric constant organosilicate materials derived from inorganic polymer blends

ACS Symposium Series

Volumn 874, Issue , 2004, Pages 144-160

  Miller, R D ^a   Volksen, W ^a   Lee, V Y ^a   Connor, E ^a   Magbitang, T ^a   Zafran, R ^a   Sundberg, L ^a   Hawker, C J ^a   Hedrick, J L ^a   Huang, E ^b   Toney, M ^a   Huang, Q R ^c   Frank, C W ^d   Kim, H C ^a  

^a IBM ALMADEN RESEARCH CENTER   (United States)

^b IBM T J WATSON RESEARCH CENTER   (United States)

^c RUTGERS UNIVERSITY   (United States)

^d Stanford University   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 49549094296     PISSN: 00976156     EISSN: None     Source Type: Book Series    
DOI: 10.1021/bk-2004-0874.ch011     Document Type: Conference Paper

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