Manipulation of texture by low-energy ion beams: Example ion assisted deposition of titanium nitride

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 127-128, Issue , 1997, Pages 813-816

  Rauschenbach, B ^a   Zeitler, M ^a   Gerlach, J W ^a   Stritzker, B ^a  

^a UNIVERSITY OF AUGSBURG   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

CRYSTAL MICROSTRUCTURE; CRYSTAL ORIENTATION; FILM GROWTH; ION BEAMS; ION BOMBARDMENT; ION IMPLANTATION; POLYCRYSTALLINE MATERIALS; RADIATION EFFECTS; SPUTTER DEPOSITION; TEXTURES;

ION BEAM ASSISTED DEPOSITION (IBAD);

TITANIUM NITRIDE;

EID: 0031547790     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0168-583X(97)00012-8     Document Type: Article

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