Tilted fiber texture in aluminum nitride thin films

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 25, Issue 4, 2007, Pages 1214-1218

  Deniz, D ^a   Harper, J M E ^a   Hoehn, J W ^b   Chen, F ^b  

^a Univ of New Hampshire   (United States)

^b SEAGATE TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ALUMINUM COMPOUNDS; DEPOSITION; MAGNETRON SPUTTERING; TEXTURES; THIN FILMS;

DEPOSITION PARAMETERS; GAS COMPOSITION; OPEN CHANNELING;

FIBERS;

EID: 34547292452     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.2712190     Document Type: Article

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