Effect of deposition angle on fiber axis tilt in sputtered aluminum nitride and pure metal films

Thin Solid Films

Volumn 515, Issue 4, 2006, Pages 1647-1650

  Dellas, N S ^a   Harper, J M E ^a  

^a Univ of New Hampshire   (United States)

Author keywords

Aluminum; Deposition process; Niobium; Nitride; Silver; Sputtering; X ray diffraction

Indexed keywords

ALUMINUM NITRIDE; CRYSTAL ORIENTATION; DEPOSITION; SPUTTERING; TEXTURES;

DEPOSITION ANGLE; DEPOSITION PROCESS; FIBER AXIS ORIENTATION;

METALLIC FILMS;

EID: 33750806533     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2006.05.039     Document Type: Article

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