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Journal of Materials Research

Volumn 16, Issue 1, 2001, Pages 210-216

Combined out-of-plane and in-plane texture control in thin films using ion beam assisted deposition

(5) Dong, L a Srolovitz, D J b Was, G S a Zhao, Q a Rollett, A D c

a UNIVERSITY OF MICHIGAN (United States)

b Princeton University (United States)

c CARNEGIE MELLON UNIVERSITY (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ALUMINUM; COMPUTER SIMULATION; CRYSTAL ORIENTATION; CRYSTALS; FILM GROWTH; ION BEAM ASSISTED DEPOSITION; ION BEAMS; TEXTURES; THERMODYNAMICS;

TEXTURE CONTROL;

THIN FILMS;

EID: 0035239712 PISSN: 08842914 EISSN: None Source Type: Journal
DOI: 10.1557/JMR.2001.0033 Document Type: Article

Times cited : (28)

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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.