Micro/nanoscale tribological and mechanical characterization for MEMS/NEMS

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5392, Issue , 2004, Pages 1-13

  Bhushan, Bharat ^a   Liu, Huiwen ^a  

^a OHIO STATE UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ADHESION; ATOMIC FORCE MICROSCOPY; BOND STRENGTH (CHEMICAL); COATING TECHNIQUES; IMAGE QUALITY; INTEGRATED CIRCUITS; INTERFACIAL ENERGY; LIGHT TRANSMISSION; SELF ASSEMBLY;

LIGHT PROCESSING; MICROMIRROR; NANOSCALE;

MICROELECTROMECHANICAL DEVICES;

EID: 5444231265     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.540419     Document Type: Conference Paper

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