Macro- and microtribology of MEMS materials

Modern Tribology Handbook: Volume One: Principles of Tribology

Volumn , Issue , 2000, Pages 1515-1548

  Bhushan, Bharat ^a  

^a Ohio State University   (United States)

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EID: 85056948771     PISSN: None     EISSN: None     Source Type: Book    
DOI: None     Document Type: Chapter

References (91)

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