Radio frequency expanding plasmas at low, intermediate, and atmospheric pressure and their applications

Pure and Applied Chemistry

Volumn 80, Issue 9, 2008, Pages 1919-1930

  Dinescu, Gheorghe ^a   Ionita, Eusebiu R ^a  

^a NATIONAL INSTITUTE FOR LASER   (Romania)

Author keywords

Atmospheric pressure plasma; Plasma cleaning; Plasma sources; Radio frequency plasma jets; Surface modification

Indexed keywords

EID: 53949098371     PISSN: 00334545     EISSN: None     Source Type: Journal    
DOI: 10.1351/pac200880091919     Document Type: Conference Paper

References (43)

1. G. Dinescu, A. de Graaf, E. Aldea, M. C. M. van de Sanden. Plasma Sources Sci. Technol. 10, 513 (2001).
2. V. Miljevic. Rev. Sci. Instrum. 55, 931 (1984).
3. V. I. Miljevic, U.S. Patent 4871 918, Filed 06 October 1987, Issued 3 October 1989.
4. V. Miljevic. Rev. Sci. Instrum. 72, 751 (2002).
5. A. Anders, S. Anders. Plasma Sources Sci. Technol. 4, 571 (1995).
6. A. Anders, M. Kühn. Rev. Sci. Instrum. 69, 1340 (1998).
7. A. Anders, S. Anders, M. Dickinson, M. Rubin, N. Newman. U.S. Patent 6137 231, Filed 10 September 1996, Issued 24 October 2000.
8. A. Anders, P. Maschwitz. U.S. Patent 6140 773, Filed 19 January 1999, Issued 31 October 2000.
9. A. Anders. U.S. Patent 6388 381, Filed 19 February 1996, Issued 14 May 2002.
10. A. E. Zhukov, R. Zhao, P. Specht, V. M. Ustinov, A. Anders, E. R. Weber. Semicond. Sci. Technol. 16, 413(2001).
11. A. Anders, G. Yu. Yushkov. Rev. Sci. Instrum. 78, 043304 (2007).
12. M. Laroussi, X. Lu. App. Phys. Lett. 87, 113902 (2005).
13. X. Lu, M. Laroussi. J. Appl. Phys. 100, 063302 (2006).
14. M. Laroussi, C. Tendero, X. Lu, S. Alia, W. L. Hynes. Plasma Process. Polym. 3, 470 (2006).
15. M. Laroussi, O. Minayeva, F. C. Dobbs, J. Woods. IEEE Trans. Plasma Sci. 34, 1253 (2006).
16. (a) E. Nasser. Fundamentals of Gaseous lonization and Plasma Electronics, Chap. 12, Wiley Interscience, New York (1971);
17. (b) E. E. Kunhardt. IEEE Trans. Plasma Sci. 28, 189 (2000).
18. L. Bardos, V. Dusek, M. Vanecek. J. Non-Cryst. Solids, 97-98, 281 (1987).
19. A. Brablec, V. Kapicka, Z. Ondrácek, P. Slavícek, M. Strecha, F. Stastný, R. Vaculík, M. Sícha. Czech. J. Phys. 49, 329 (1999).
20. J. Tous, M. Sícha, Z. Hubicka, L. Soukup, L. Jastrabík, M. Cada, M. Tichý. Contrib. Plasma Phys. 42, 119(2002).
21. D. Korzec, D. Nithammer, J. Engemann, T. Ikeda, T. Aoki, Y. Hatanaka. Surf. Coat. Technol. 142-144, 21 (2001).
22. R. Foest, E. Kindel, H. Lange, A. Ohl, M. Stieber, K.-D. Weltmann. Contrib. Plasma Phys. 47, 119(2006).
23. A. Yanguas-Gil, K. Focke, J. Benedikt, A. von Keudell. J. Appl. Phy. 101, 103307 (2007).
24. H. Baránkova, L. Bárdos, S. Berg. Vacuum 46, 1433 (1995).
25. L. Bárdos, H. Baránková. Plasma Process. Polym. 4, 511 2007.
26. M. Sícha, Z. Hubicka, L. Soukup, L. Jastrabík, M. Cada, P. Spatenka. Surf. Coat. Technol. 148, 199 (2001).
27. H. Baránková, L. Bárdos. Appl. Phys. Lett. 76, 285 (2000).
28. H. Koinuma, H. Ohkubo, T. Hashimoto, K. Inomata, T. Shiraishi, A. Miyanaga, S. Hayashi. Appl. Phys. Lett. 60, 816 (1992).
29. E. Stoffels, A. J. Flikweert, W. W. Stoffels, G. M. W. Kroesen. Plasma Sources Sci. Technol. 4, 383 (2002).
30. E. Stoffels, I. E. Kieft, R. E. J Sladek. J. Phys. D: Appl. Phys. 36, 2908 (2003).
31. J. Goree, B. Liu, D. Drake, E. Stoffels. IEEE Trans. Plasma Sci. 34, 1317 (2006).
32. A. Schultze, J. Y. Jeong, S. E. Babayan, J. Park, G. S. Selwyn, R. F. Hicks. IEEE Trans. Plasma Sci. 26, 1685 (1998).
33. J. Park, I. Henins, H. W. Herrmann, G. S. Selwyn, J. Y. Jeong, R. F. Hicks, D. Shim, C. S. Chang. Appl. Phys. Lett. 76, 288 (2000).
34. M. Moravej, R. F. Hicks. Chem. Vap. Dep. 11, 469 (2005).
35. J. Y. Jeong, S. E. Babayan, V. J. Tu, J. Park, I. Henins, R. F. Hicks, G. S. Selwyn. Plasma Sources Sci. Technol. 7, 282 (1998).
36. Y. Kabouzi, M. D. Calzada, M. Moisan, K. C. Tran, C. Trassy. J. Appl. Phys. 91, 1008 (2000).
37. G. Dinescu, B. Mitu, E. Aldea, M. Dinescu. Vacuum 56, 83 (2000).
38. O. M. Yardimci, A. V. Saveliev, A. A. Fridman, L. A. Kennedy. J. Appl. Phys. 87, 1632 (1999).
39. S. Vizireanu, B. Mitu, G. Dinescu. Surf. Coat. Technol. 200, 1132 (2005).
40. S. Vizireanu, B. Mitu, G. Dinescu, L. Nistor, C. Ghica, A. Maraloiu, M. Stancu, G. Ruxandra. J. Optoelect. Adv. Mater. 9, 1649 (2007).
41. G. Dinescu, C. Ruset, M. Dinescu. Plasma Process. Polym. 4, 282 (2007).
42. A. Malesevic, S. Vizireanu, R. Kemps, A. Vanhulsel. C. van Haesendonck, G. Dinescu. Carbon 45, 2932 (2007).
43. G. Dinescu, E. R. Ionita, I. Luciu, C. Grisolia. Fusion Eng. Des. 82, 2311 (2007).