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Surface and Coatings Technology

Volumn 142-144, Issue , 2001, Pages 21-27

Radio frequency hollow cathode jet: Optical emission study

(6) Korzec, D a Nithammer, D a Engemann, J a Ikeda, T b Aoki, T b Hatanaka, Y b

a UNIVERSITY OF WUPPERTAL (Germany)

b SHIZUOKA UNIVERSITY (Japan)

Author keywords

Emission spectroscopy; Hydrogen plasma; Radial source; Remote plasma; Rf discharg

Indexed keywords

CATHODES; FREE RADICALS; HYDROGEN; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; SPECTROSCOPIC ANALYSIS;

RADIO FREQUENCY CATHODE JETS;

COATINGS;

PLASMA TREATMENT;

EID: 0035387515 PISSN: 02578972 EISSN: None Source Type: Journal
DOI: 10.1016/S0257-8972(01)01241-5 Document Type: Article

Times cited : (7)

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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.