Low-energy linear oxygen plasma source

Review of Scientific Instruments

Volumn 78, Issue 4, 2007, Pages

  Anders, Andrá ^a   Yushkov, George Yu ^b  

^a UNIVERSITY OF CALIFORNIA   (United States)

^b INSTITUTE OF HIGH CURRENT ELECTRONICS   (Russian Federation)

Author keywords

[No Author keywords available]

Indexed keywords

CERMETS; CONSTRUCTION; DEPOSITION; FLOW RATE; MASS SPECTROMETERS; OXYGEN; PLASMA APPLICATIONS;

ATOMIC IONS; ENERGY ANALYZERS; ION CURRENTS; LINEAR OXYGEN PLASMA;

PLASMA SOURCES;

ION; OXYGEN;

ARTICLE; CHEMISTRY; ELECTRIC CONDUCTIVITY; ELECTROMAGNETIC FIELD;

ELECTRIC CONDUCTIVITY; ELECTROMAGNETIC FIELDS; IONS; OXYGEN;

EID: 34247583003     PISSN: 00346748     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2723753     Document Type: Article

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