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Contributions to Plasma Physics

Volumn 42, Issue 1, 2002, Pages 119-131

The radio frequency hollow cathode discharge induced by the RF discharge in the plasma-jet chemical reactor

(7) Tous J a Sicha M a Hubicka Z a Soukup, L a Jastrabik L a Cada M a Tichy M b

a INSTITUTE OF PHYSICS (Czech Republic)

b CHARLES UNIVERSITY (Czech Republic)

Author keywords

[No Author keywords available]

Indexed keywords

CATHODES; ELECTRIC DISCHARGES; ELECTRON SOURCES; PLASMA JETS; RADIO WAVES; SUPERSONIC AERODYNAMICS; THIN FILMS;

AXIAL DISTRIBUTION; HOLLOW CATHODE DISCHARGE; HOLLOW CATHODES; LOW PRESSURE PLASMA; PLASMA REACTORS; PROPERTY; RADIO FREQUENCY DISCHARGES; RADIOFREQUENCIES; SUPERSONIC PLASMA JETS; THIN-FILMS;

NOZZLES;

EID: 0036001690 PISSN: 08631042 EISSN: None Source Type: Journal
DOI: 10.1002/1521-3986(200201)42:1<119::AID-CTPP119>3.0.CO;2-7 Document Type: Article

Times cited : (5)

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