Toward the in situ remediation of carbon deposition on Ru-capped multilayer mirrors intended for EUV lithography: Exploiting the electron-induced chemistry

Journal of Physical Chemistry C

Volumn 111, Issue 33, 2007, Pages 12165-12168

  Davis, David J ^a   Kyriakou, Georgios ^a   Grant, Robert B ^b   Tikhov, Mintcho S ^a   Lambert, Richard M ^a  

^a UNIVERSITY OF CAMBRIDGE   (United Kingdom)

^b Lithography Subsystems   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

CARBON; CONTAMINATION; DEPOSITION; ELECTRON IRRADIATION; LITHOGRAPHY; MIRRORS; RUTHENIUM;

ELECTRON-INDUCED CHEMISTRY; ENERGY DISTRIBUTION; LOW-ENERGY ELECTRON IRRADIATION; MULTILAYER MIRRORS;

MULTILAYERS;

EID: 34548554311     PISSN: 19327447     EISSN: 19327455     Source Type: Journal    
DOI: 10.1021/jp074766y     Document Type: Article

References (14)

1. Kyriakou, G.; Davis, D. J.; Grant, R. B.; Watson, D. J.; Keen, A.; Tikhov, M. S.; Lambert, R. M. J. Phys. Chem. C 2007, 111, 4491.
2. Clift, W. M.; Klebanoff, L.; Tarrio, C.; Grantham, S.; Wood, O.; Wurm, S.; Edwards, N. V. Proc. SPIE 2004, 5374, 666.
3. Madey, T. E.; Faradzhev, N. S.; Yakshinskiy, B. V.; Edwards, N. V. Appl. Surf. Sci. 2006, 231, 1691.
4. Klebanoff, L. E.; Clift, W. M; Malinowski, M. E.; Steinhaus, C.; Grunow, P.; Bajt, S. J. Vac. Sci. Technol., B 2002, 20, 696.
5. Moulder, J. F.; Stickle, W. F.; Sobol, P. E.; Bomben, K. D. Handbook of X-ray Photoelectron Spectroscopy; Physical Electronics: Eden Prairie, MN, 1995.
6. Tanuma, S.; Powell, C. J.; Penn, D. R. Surf. Interface Anal. 2004, 36, 1.
7. Hornung, A.; Zemlyanov, D.; Muhler, M.; Ertl, G. Surf. Sci. 2006, 600, 370.
8. Umbach, E.; Kulkami, S.; Feulner, P.; Menzel, D. Surf. Sci. 1979, 88, 65.
9. Egawa, C.; Naito, S.; Tamaru, K. Surf. Sci. 1984, 138, 279.
10. Bondino, F.; Baraldi, A.; Comelli, G.; Netzer, F. P. Surf. Sci. 2000, 461, 31.
11. Blume. R.; Havecker, M.; Zafeiratos, S.; Teschner, D.; Kleimenov, E.; Knop-Gericke, A.; Schlogl, R.; Barinov, A.; Dudin, P.; Kiskinova, M. J. Catal. 2006, 239, 354.
12. Schiffer, A.; Jacob, P.; Menzel, D. Surf. Sci. 1997, 389, 116.
13. Barber, M.; Evans, E. L.; Thomas, J. M. Chem. Phys. Lett. 1973, 18, 423.
14. Seah, M. P.; Dench, W. A. Surf. Interface Anal. 1979, 1, 2.