A closed-form distributed-parameters modeling framework for piezoresistive-based microcantilever sensors with application to nanoscale force measurement

ASME International Mechanical Engineering Congress and Exposition, Proceedings

Volumn 9 PART B, Issue , 2008, Pages 1383-1392

  Saeidpourazar, Reza ^a   Jalili, Nader ^a  

^a AMRL   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCE MICROSCOPY; CANTILEVER BEAMS; FORCE MEASUREMENT; MATHEMATICAL MODELS; PIEZOELECTRIC MATERIALS; SENSORS; BIOLOGICAL MATERIALS; CHEMICAL SENSORS; NANOTECHNOLOGY;

DISTRIBUTED PARAMETERS MODELING; PIEZORESISTIVE MICROCANTILEVERS; CLOSED FORM MODELING; DISTRIBUTED PARAMETER; DISTRIBUTED PARAMETERS MODELS; LUMPED-PARAMETERS MODELS; MICRO CANTILEVER SENSORS; NONCONTACT ATOMIC FORCE MICROSCOPY; PIEZORESISTIVE MICROCANTILEVER; SENSING APPLICATIONS;

DISTRIBUTED PARAMETER CONTROL SYSTEMS; COMPOSITE MICROMECHANICS;

EID: 44349175412     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1115/IMECE2007-42507     Document Type: Conference Paper

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