|
|
Volumn 17, Issue 3, 2008, Pages
|
|
Two-dimensional fluid model of a two-chamber plasma source
|
|
Author keywords
[No Author keywords available]
|
|
Indexed keywords
ARGON;
ATMOSPHERIC ELECTRICITY;
AUTOMOBILE DRIVERS;
CHARGED PARTICLES;
DIFFUSION;
DISCHARGE (FLUID MECHANICS);
ELECTRIC FIELD EFFECTS;
ELECTRIC FIELDS;
ELECTRIC LOSSES;
ELECTROMAGNETIC FIELD THEORY;
ELECTROMAGNETIC FIELDS;
ELECTROMAGNETISM;
ELECTRON ENERGY LEVELS;
ELECTRONS;
ENERGY DISSIPATION;
FLUID MECHANICS;
FLUXES;
INERT GASES;
IONS;
METALS;
PLASMA DENSITY;
PLASMA SOURCES;
PLASMAS;
SEMICONDUCTOR DOPING;
SIZE DISTRIBUTION;
THERMAL EXPANSION;
TWO DIMENSIONAL;
AMBIPOLAR DIFFUSION;
ARGON DISCHARGES;
CONVECTIVE FLUXES;
DC CURRENTS;
DC ELECTRIC FIELDS;
DIFFERENT SIZES;
DISCHARGE VESSEL;
DRIFT-DIFFUSION;
DRIFT-DIFFUSION APPROXIMATION;
ELECTRON COOLING;
ELECTRON FLUXES;
ENERGY FLUXES;
ENERGY LOSSES;
GAS PRESSURES;
ION FLUXES;
ION MOTIONS;
MODERATE PRESSURES;
PLASMA CHAMBER;
PLASMA EXPANSION;
PLASMA MODELING;
PLASMA VOLUMES;
RADIAL ION;
SPATIAL DISTRIBUTION OF;
TWO-DIMENSIONAL FLUID MODEL;
ELECTRIC DISCHARGES;
|
|
EID: 51849162260
PISSN: 09630252
EISSN: 13616595
Source Type: Journal
DOI: 10.1088/0963-0252/17/3/035017 Document Type: Article |
|
Times cited : (17)
|
|
References (31)
|
