Probe diagnostics of expanding plasmas at low gas pressure

Plasma Processes and Polymers

Volumn 3, Issue 2, 2006, Pages 156-159

  Dimitrova, Mariya ^a   Djermanova, Nina ^a   Kiss'ovski, Zhivko ^a   Kolev, Stanimir ^a   Shivarova, Antonia ^a   Tsankov, Tsanko ^a  

^a UNIVERSITY OF SOFIA   (Bulgaria)

Author keywords

Expanding plasmas; HF discharges; Inductively coupled plasmas; Langmuir probes; Low pressure discharges

Indexed keywords

ARGON; GAS DISCHARGE TUBES; INDUCTIVELY COUPLED PLASMA; PLASMA DENSITY; PLASMA SOURCES;

EXPANDING PLASMAS; LANGMUIR PROBES; LOW GAS PRESSURE; LOW PRESSURE DISCHARGES; PROBE DIAGNOSTICS;

PLASMA PROBES;

EID: 33644554479     PISSN: 16128850     EISSN: None     Source Type: Journal    
DOI: 10.1002/ppap.200500096     Document Type: Article

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