EEDF measurements in plasma expansion region of a high-frequency driven hydrogen discharge

Journal of Physics: Conference Series

Volumn 63, Issue 1, 2007, Pages

  Djermanova, N ^a   Kiss'Ovski, Zh ^a   Lishev, St ^a   Tsankov, Ts ^a  

^a UNIVERSITY OF SOFIA   (Bulgaria)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 34250819956     PISSN: 17426588     EISSN: 17426596     Source Type: Conference Proceeding    
DOI: 10.1088/1742-6596/63/1/012013     Document Type: Article

References (13)

1. Godyak V A, Piejak R B and Alexandrovich B M 2002 Plasma Sources Sci. Technol. 11 525
2. Liebermann M A and Lichtenberg A J 2005 Principles of Plasma Discharges and Materials Processing (Hoboken: Wiley)
3. Loeb H W 2005 Plasma Phys. Control. Fusion 47 B565-76
4. Speth E et al 2005 Fusion Eng. Des. 74 279-82
5. Crowley B, Homfray D, Cox S J, Boilson D, de Esch H P L and Hemsworth R S 2006 Nucl. Fusion 46 S307-12
6. Holmes A J T 1992 Plasma Phys. Control. Fusion 34 653
7. Tsankov Ts, Kiss'ovski Zh, Djermanova N and Kolev St 2006 Plasma Process. Polym. 3 151-5
8. Dimitrova M, Djermanova N, Kiss'ovski Zh, Kolev St, Shivarova A and Tsankov Ts 2006 Plasma Process. Polym. 3 156-9
9. Kiss'ovski Zh, Kolev St, Shivarova A and Tsankov Ts 2006 IEEE Trans. Plasma Sci. submitted
10. Djermanova N, Ezekiev O, Kissovski Zh, Kolev St and Shivarova A 2004 Vacuum 76 389-92
11. Djermanova N, Kiss'ovski Zh and Tsankov Ts 2006 Contrib. Plasma Phys. 46 312-21
12. Janev R K, Langer W D, Evans K Jr and Post D E Jr 1987 Elementary Processes in Hydrogen-Helium Plasmas p (Berlin: Springer)
13. Golant V E, Zhilinski A P and Sakharov I E 1977 Fundamentals of Plasma Physics (New York: Wiley)