H- to W-mode transitions and properties of a multimode helicon plasma reactor

Plasma Sources Science and Technology

Volumn 12, Issue 4, 2003, Pages 561-575

  Kinder, Ronald L ^a,c   Ellingboe, A R ^b   Kushner, Mark J ^a  

^a University of Illinois at Urbana Champaign   (United States)

^b DUBLIN CITY UNIVERSITY   (Ireland)

^c Novellus Systems   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRIC FIELD EFFECTS; ELECTROSTATICS; HELICONS; INDUCTIVELY COUPLED PLASMA; MAGNETIC FIELD EFFECTS; MATHEMATICAL MODELS; MAXWELL EQUATIONS; PHASE TRANSITIONS; PLASMA DENSITY;

AXIAL WAVELENGTH; MULTIMODE HELICON PLASMA REACTOR; SPATIAL MODEL STRUCTURE;

PLASMA SOURCES;

EID: 0345015520     PISSN: 09630252     EISSN: None     Source Type: Journal    
DOI: 10.1088/0963-0252/12/4/308     Document Type: Article

References (34)

1. Carter C and Khachan J 1999 Plasma Source Sci. Technol. 8 432
2. Kim S S, Chang S C, Yoon S N and Whang K 1999 Phys. Plasmas 6 2926
3. Shamrai P K and Taranov B V 1996 Plasma Source Sci. Technol. 5 474
4. Boswell W R and Chen F F 1997 Trans. Plasma Sci. 25 1229
5. Chen F F and Boswell W R 1997 Trans. Plasma Sci. 25 1245
6. Shamrai P K 1998 Plasma Source Sci. Technol. 7 499
7. Mouzouris Y and Scharer E J 1998 Phys. Plasmas 5 4253
8. Arnush D 2000 Phys. Plasmas 7 3042
9. Borg G G and Boswell W R 1998 Phys. Plasmas 5 564
10. Chen F F and Blackwell D D 1999 Phys. Rev. Lett. 82 2677
11. Keiter P A, Scime E E and Balkey M M 1997 Phys. Plasmas 4 2741
12. Kwak G J, Choi D H, Bak I H, Cho S, Bak G J and Kim K S 1997 Plasmas 4 1463
13. Kline L J, Scime E E, Boivin F R, Keese M A, Sun X and Mikhailenko V S 2002 Phys. Rev. Lett. 88 195002
14. Cho S 2000 Phys. Plasmas 7 417
15. Lieberman A M and Lichtenberg J A 1994 Principles of Plasma Discharges and Materials Processing (New York: Wiley)
16. Ellingboe R A and Boswell W R 1996 Phys. Plasmas 3 2797
17. Ellingboe R A 1998 Waves and power deposition in a magento-plasma PhD Thesis Australian National University
18. Chen F F and Arnush D 1997 Phys. Plasmas 4 3411
19. Kinder L R and Kushner J M 2001 J. Vac. Sci. Technol. A 19 76
20. Kinder L R and Kushner J M 2001 J. Appl. Phys. 90 3699
21. Freynd W R and Nachtigal M N 1994 Siam J. Scientific Comput. 15 313
22. Borg G G and Kamenski V 1997 Phys. Plasmas 4 529
23. Degeling W A and Boswell W R 1997 Phys. Plasmas 4 2748
24. Molvik W A, Ellingboe R A and Rognlien D T 1997 Phys. Rev. Lett. 79 233
25. Rauf S and Kushner J M 1997 J. Appl. Phys. 82 2806
26. Degeling W A, Jung O C, Boswell W R and Ellingboe R A 1996 Phys. Plasmas 3 2788
27. Schneider P T, Dostalik W W, Springfield D A and Kraft R 1999 Plasma Source Sci. Technol. 8 397
28. Tynan R G et al 1997 J. Vac. Sci. Technol. A 15 2885
29. Chen F F 1992 J. Vac. Sci. Technol. A 10 1389
30. Arnush D and Chen F F 1998 Phys. Plasmas 5 1239
31. Kamenski I V and Borg G G 1998 Comput. Phys. Commun. 113 10
32. Enk Th and Krämer M 2000 Phys. Plasmas 7 4308
33. Shamrai K P and Shinohara S 2001 Phys. Plasmas 8 4659
34. Carter M D et al 2002 Phys. Plasmas 9 5097