Recognition of diffraction-grating profile using a neural network classifier in optical scatterometry

Journal of the Optical Society of America A: Optics and Image Science, and Vision

Volumn 25, Issue 7, 2008, Pages 1661-1667

  Gereige, Issam ^a   Robert, Stéphane ^a   Thiria, Sylvie ^b   Badran, Fouad ^b,c   Granet, Gérard ^d   Rousseau, Jean Jacques ^a  

^a UNIVERSITÉ JEAN MONNET   (France)

^b UNIVERSITÉ PIERRE ET MARIE CURIE   (France)

^c CEDRIC CNAM   (France)

^d Laboratoire des Sciences et Materiaux Pour l'Electronique   (France)

Author keywords

[No Author keywords available]

Indexed keywords

CLASSIFICATION (OF INFORMATION); CLASSIFIERS; DIFFRACTION; IMAGE CLASSIFICATION; INVERSE PROBLEMS; LEARNING SYSTEMS; PHOTORESISTS; SEMICONDUCTOR DEVICE MANUFACTURE; SILICON COMPOUNDS;

ARTIFICIAL NEURAL NETWORK; GEOMETRICAL MODELLING; GLASS SUBSTRATES; GRATING PROFILES; NEURAL NETWORK CLASSIFIERS; OPTICAL-; SCATTERED INTENSITY; SCATTEROMETRY; SEMICONDUCTOR INDUSTRIES; STRUCTURAL GEOMETRIES; TWO TYPES;

NEURAL NETWORKS;

EID: 51849147610     PISSN: 10847529     EISSN: 15208532     Source Type: Journal    
DOI: 10.1364/JOSAA.25.001661     Document Type: Article

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