Phase-modulation scatterometry

Applied Optics

Volumn 41, Issue 34, 2002, Pages 7187-7192

  Logofătu, Petre C ^a,b  

^a UNIVERSITY OF NEW MEXICO   (United States)

^b NATIONAL INSTITUTE FOR LASER   (Romania)

Author keywords

[No Author keywords available]

Indexed keywords

HARMONIC ANALYSIS; PHASE MODULATION; PHOTODETECTORS; REFLECTION; SENSITIVITY ANALYSIS;

PHASE-MODULATION SCATTEROMETRY;

DIFFRACTION GRATINGS;

EID: 0036905699     PISSN: 1559128X     EISSN: 21553165     Source Type: Journal    
DOI: 10.1364/AO.41.007187     Document Type: Article

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