Experimental characterization of subwavelength diffraction gratings by an inverse-scattering neural method

Journal of the Optical Society of America A: Optics and Image Science, and Vision

Volumn 19, Issue 12, 2002, Pages 2394-2402

  Robert, Stéphane ^a   Ravaud, Alain Mure ^a   Reynaud, Stéphanie ^a   Fourment, Sabine ^b   Carcenac, Franck ^b   Arguel, Philippe ^b  

^a UNIVERSITÉ JEAN MONNET   (France)

^b LAAS CNRS   (France)

Author keywords

[No Author keywords available]

Indexed keywords

ETCHING; NEURAL NETWORKS; SCATTERING; SILICON;

INVERSE-SCATTERING;

DIFFRACTION GRATINGS;

EID: 0042073135     PISSN: 10847529     EISSN: None     Source Type: Journal    
DOI: 10.1364/JOSAA.19.002394     Document Type: Article

References (19)

1. A. Roberts, "Probe-sample interaction in near-field microscopy: analysis of the interaction between a metal diffraction grating and a plane conductor," Opt. Commun. 98, 225-230 (1993).
2. O. J. F. Martin, C. Girard, and A. Dereux, "Dielectric versus topographic contrast in near-field microscopy," J. Opt. Soc. Am. A 13, 1801-1809 (1996).
3. J. M. Bonard, J. D. Ganière, F. Morier-Genoud, and M. Achtenhagen, "Characterization of semi-conductor submicron gratings: is there an alternative to scanning microscopy?" Semicond. Sci. Technol. 11, 410-414 (1996).
4. A. Roger and D. Maystre, "Inverse scattering method in electromagnetic optics: application to diffraction gratings," J. Opt. Soc. Am. 70, 1483-1495 (1980).
5. N. Destouches, C.-A. Guérin, M. Lequime, and H. Giovannini, "Determination of the phase of the diffracted field in the optical domain. Application to the reconstruction of surface profiles," Opt. Commun. 198, 233-239 (2001).
6. M. Drege, J. A. Reed, and D. M. Byrne, "Linearized inversion of scatterometric data to obtain surface profile information," Opt. Eng. 41, 225-236 (2002).
7. J. N. Gillet and Y. Sheng, "Iterative simulated quenching for designing irregular-spot-array generators," Appl. Opt. 39, 3456-3465 (2000).
8. S. S. H. Naqvi, R. H. Krukar, J. R. McNeil, J. E. Franke, T. M. Niemczyk, D. M. Haaland, R. A. Gottscho, and A. Kornblit, "Etch-depth estimation of large-period silicon gratings with multivariate calibration of rigorously simulated diffraction profiles," J. Opt. Soc. Am. A 11, 2485-2493 (1994).
9. R. H. Krukar, S. L. Prins, D. M. Krukar, G. A. Peterson, S. M. Gaspar, J. R. McNeil, and S. S. H. Naqvi, "Using scattered light modeling for semiconductor critical dimension metrology and calibration," in Integrated Circuits Metrology, Inspection, and Process Control VII, M. T. Postek, ed., Proc. SPIE 1926, 60-70 (1993).
10. J. Bischoff, J. Bauer, U. Haak, L. Hutschenreuther, and H. Truckenbrodt, "Optical scatterometry of quarter micron patterns using neural regression," in Metrology, Inspection, and Process Control for Microlithography XII, B. Singh, ed., Proc. SPIE 3332, 526-537 (1998).
11. J. N. Hwang, C. H. Chan, and R. J. Marks, "Frequency selective surface design based on iterative inversion of neural networks," presented at IJCNN'90, the 2nd IEEE International Joint Conference on Neural Networks, Washington, D.C., January 15-19, 1990.
12. I. Kallioniemi, J. Saarinen, and E. Oja, "Optical scatterometry of subwavelength diffraction gratings: neural network approach," Appl. Opt. 37, 5830-5835 (1998).
13. I. Kallioniemi, J. Saarinen, and E. Oja, "Characterization of diffraction gratings in a rigorous domain with optical scatterometry: hierarchical neural-network model," Appl. Opt. 38, 5920-5930 (1999).
14. J. Bischoff, H. Truckenbrodt, and J. Bauer, "Diffraction analysis based characterization of very thin gratings," in Micro-optical Technologies for Measurement, Sensors and Microsystems II and Optical Fiber Sensor Technologies and Applications, O. Parriaux, B. Culshaw, M. Breidne, and E. B. Kley, eds., Proc. SPIE 3099, 212-222 (1997).
15. S. Robert, A. Mure-Ravaud, and D. Lacour, "Optical diffraction grating characterization using a neural method," J. Opt. Soc. Am. A 19, 24-32 (2002).
16. L. S. Dongmo, J. S. Villarrubia, S. N. Jones, T. B. Renegar, M. T. Postek, and J. F. Song, "Experimental test of blind tip reconstruction for scanning probe microscopy," Ultramicroscopy 85, 141-453 (2000).
17. L. Li, "Multilayer modal method for diffraction gratings of arbitrary profile, depth, and permittivity," J. Opt. Soc. Am. A 10, 2581-2591 (1993).
18. C. M. Bishop, Neural Networks for Pattern Recognition (Oxford U. Press, New York, 1995).
19. M. T. Hagan and M. Menhaj, "Training feedforward networks with the Marquardt algorithm," IEEE Trans. Neural Netw. 5, 989-993 (1994).