Rapid Control of submicrometer periodic structures by a neural inversion from ellipsometric measurement

Optics Communications

Volumn 278, Issue 2, 2007, Pages 270-273

  Gereige, Issam ^a   Robert, Stéphane ^a   Granet, Gérard ^b   Jamon, Damien ^a   Rousseau, Jean Jacques ^a  

^a EA 3523   (France)

^b CNRS   (France)

Author keywords

[No Author keywords available]

Indexed keywords

DIFFRACTION GRATINGS; MICROELECTRONICS; NEURAL NETWORKS; OPTIMIZATION; SPECTROSCOPIC ELLIPSOMETRY;

NEURAL INVERSION; SUBMICROMETER PERIODIC STRUCTURES;

PERIODIC STRUCTURES;

EID: 34548282621     PISSN: 00304018     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.optcom.2007.06.008     Document Type: Article

References (13)

1. Yang W., Hu J., Lowe-Webb R., Korlahalli R., Shivaprasad D., Sasano H., Liu W., and Mui D. IEEE Trans. Semiconduct. Manuf. 17 (2004) 564
2. J. Bischoff, J. Bauer, U. Haak, L. Hutschenreuther, H. Truckenbrodt, in: Metrology, Inspection, and Process Control for Microlithography XII, Proc. SPIE 3332 (1998) 64.
3. Niu X., Jakatdar N., Bao J., and Spanos C. IEEE Trans. Semiconduct. Manuf. 14 (2001) 97
4. X. Niu, N. Jakatdar, J. Bao, C. Spanos, S. Yedur, in: Metrology, Inspection, and Process Control for Microlithography XIII, Proc. SPIE 3677 (1999) 159.
5. Krukar R., Kornblit A., Clark L.A., Krukar J., Lambert D., Reitman E.A., and Gottscho R.A. J. Appl. Phys. 74 (1993) 3698
6. Naqvi S.S.H., Krukar R.H., McNeil J.R., Franke J.E., Niemczyk T.M., Haaland D.M., Gottscho R.A., and Kornblit A. J. Opt. Soc. Am. A 11 (1994) 2485
7. Huang H.-T., and Terry Jr. F.L. Thin Solid Films 468 (2004) 339
8. Kallioniemi I., Saarinen J., and Oja E. Appl. Opt. 37 (1998) 5830
9. Robert S., Mure-Ravaud A., and Lacour D. J. Opt. Soc. Am 19 1 (2002) 24
10. Bishop C.M. Neural Networks for Pattern Recognition (1996), Oxford University Press
11. Moharam M.G., and Gaylord T.K. J. Opt. Soc. Am. A 73 (1983) 1105
12. Li L. J. Opt. Soc. Am. A 13 (1996) 1870
13. Robert S., Mure-Ravaud A., Thiria S., and Badran F. Eur. Phys. J. Appl. Phys. 31 (2005) 71