Applications of angular scatterometry for the measurement of multiply-periodic features

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5038 I, Issue , 2003, Pages 577-584

  Raymond, Christopher J ^a   Littau, Mike ^a   Youn, Byungjoo ^b   Sohn, Chang Jin ^b   Kim, J A ^c   Kang, Young Seog ^c  

^a NANOMETRICS INC   (United States)

^b Accent Optical Technologies Korea   (South Korea)

^c SAMSUNG Electronics   (South Korea)

Author keywords

CD; Contact; Diffract; H ole; Lithography; Memory; Metrology; Optical; Scatterometry

Indexed keywords

DIFFRACTION GRATINGS; DYNAMIC RANDOM ACCESS STORAGE; LIGHT MEASUREMENT; LIGHT SCATTERING; MATHEMATICAL MODELS; MICROELECTROMECHANICAL DEVICES; MICROELECTRONIC PROCESSING; REFLECTION;

COUPLED WAVE THEORY; OPTICAL METROLOGY; SCATTEROMETRY;

PHOTOLITHOGRAPHY;

EID: 0141723640     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.488116     Document Type: Conference Paper

References (12)

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