Statistical evaluation for anomalous SILC of tunnel oxide using integrated array TEG

IEEE International Reliability Physics Symposium Proceedings

Volumn , Issue , 2008, Pages 219-224

  Kumagai, Yuki ^a   Teramoto, Akinobu ^a   Sugawa, Shigetoshi ^a   Suwa, Tomoyuki ^a   Ohmi, Tadahiro ^a  

^a TOHOKU UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

CLARIFICATION; DATA STORAGE EQUIPMENT; ELECTRIC CURRENTS; ELECTRON TUNNELING; LEAKAGE CURRENTS; RELIABILITY; TEMPERATURE MEASUREMENT; THERMOELECTRIC EQUIPMENT;

RELIABILITY PHYSICS; TUNNEL OXIDE];

FLASH MEMORY;

EID: 51549113639     PISSN: 15417026     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/RELPHY.2008.4558890     Document Type: Conference Paper

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