Electrical stress-induced variable range hopping conduction in ultrathin silicon dioxides

Applied Physics Letters

Volumn 70, Issue 3, 1997, Pages 351-353

  Okada, Kenji ^a   Taniguchi, Kenji ^b  

^a PANASONIC CORPORATION   (Japan)

^b OSAKA UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

CAPACITORS; CURRENT VOLTAGE CHARACTERISTICS; ELECTRIC FIELD EFFECTS; ELECTRONIC DENSITY OF STATES; LEAKAGE CURRENTS; MATHEMATICAL MODELS; MOS DEVICES; THERMAL EFFECTS; ULTRATHIN FILMS;

ELECTRIC STRESS; FOWLER-NORDHEIM STRESS; TRAP SITES; VARIABLE RANGE HOPPING CONDUCTION;

SILICA;

EID: 0030785003     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.118411     Document Type: Article

References (8)

1. G. A. Sai-Halasz, M. R. Wordeman, D. P. Kern, E. Ganin, S. Rishton, H. Y. Ng, D. S. Zicherman, D. Moy, T. H. P. Chang, and R. H. Dennard, 1987 Inlernalional Electron Devices Meeting Technical Digest (IEEE, Washington, D.C., 1987), p. 397.
2. K. Okada and Y. Hirofuji, Extended Abstracts of The 54th Autumn Meeting (The Japan Soc. of Appl. Phys., Sapporo, 1993), p. 633 (27p-X-3); K. Okada, S. Kawasaki, and Y. Hirofuji, Extended Abstracts of Solid State Devices and Materials (The Japan Society of Applied Physics, Yokohama, 1994), p. 565.
3. K. Okada and Y. Hirofuji, Extended Abstracts of The 54th Autumn Meeting (The Japan Soc. of Appl. Phys., Sapporo, 1993), p. 633 (27p-X-3); K. Okada, S. Kawasaki, and Y. Hirofuji, Extended Abstracts of Solid State Devices and Materials (The Japan Society of Applied Physics, Yokohama, 1994), p. 565.
4. K. Okada and S. Kawasaki, Extended Abstracts of Solid State Devices and Materials (The Japan Society of Applied Physics, Osaka, 1995), p. 473.
5. S.-H. Lee. B.-J. Cho, J.-C. Kim, and S.-H. Choi, 1994 International Electron Devices Meeting Technical Digest (IEEE, San Francisco, 1994), p. 605.
6. T. Yoshida, S. Miyazaki, and M. Hirose, Extended Abstracts of Solid State Devices and Materials (The Japan Society of Applied Physics, Yokohama, 1996), p. 539.
7. N. F. Mort and E. A. Davis, Electronic Processes in Non-Crystalline Materials (Clarendon, Oxford, 1979).
8. P. A. Lee, Phys. Rev. Lett. 53, 2042 (1984).