Effects of UV cure on glass structure and fracture properties of nanoporous carbon-doped oxide thin films

Journal of Applied Physics

Volumn 104, Issue 4, 2008, Pages

  Gage, David M ^a   Stebbins, Jonathan F ^b   Peng, Luming ^b   Cui, Zhenjiang ^c   Al Bayati, Amir ^c   MacWilliams, Kenneth P ^c   M'Saad, Hichem ^c   Dauskardt, Reinhold H ^a  

^a Stanford University   (United States)

^b STANFORD UNIVERSITY   (United States)

^c APPLIED MATERIALS INC   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

BRITTLENESS; CARBON FILMS; COMPUTER NETWORKS; FOURIER TRANSFORM INFRARED SPECTROSCOPY; FOURIER TRANSFORMS; GLASS; INFRARED SPECTROSCOPY; MAGNETIC RESONANCE; NUCLEAR MAGNETIC RESONANCE; NUCLEAR MAGNETIC RESONANCE SPECTROSCOPY; OXIDE FILMS; RADIATION EFFECTS; RESONANCE; SPECTROSCOPIC ANALYSIS; THICK FILMS; ULTRAVIOLET RADIATION;

FRACTURE PROPERTIES; GLASS STRUCTURES;

FRACTURE;

EID: 50849122022     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2968438     Document Type: Article

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