Thermomechanical properties of thin organosilicate glass films treated with ultraviolet-assisted cure

Acta Materialia

Volumn 55, Issue 4, 2007, Pages 1407-1414

  Iacopi, F ^a   Beyer, G ^a   Travaly, Y ^a   Waldfried, C ^b   Gage, D M ^c   Dauskardt, R H ^c   Houthoofd, K ^d   Jacobs, P ^d   Adriaensens, P ^e   Schulze, K ^f   Schulz, S E ^f   List, S ^a   Carlotti, G ^g  

^a IMEC   (Belgium)

^b AXCELIS TECHNOLOGIES   (United States)

^c Stanford University   (United States)

^d Bio Engineering Department   (Belgium)

^e IMO Division Chemistry   (Belgium)

^f CHEMNITZ UNIVERSITY OF TECHNOLOGY   (Germany)

^g UNIVERSITY OF PERUGIA   (Italy)

Author keywords

Elastic behaviour; Fracture; Organosilicate glasses; Thermal conductivity; UV curing

Indexed keywords

CROSSLINKING; CURING; GLASS; ORGANOMETALLICS; THERMAL CONDUCTIVITY; ULTRAVIOLET RADIATION;

ELASTIC BEHAVIOR; ORGANOSILICATE GLASSES; UV-CURING;

THIN FILMS;

EID: 33846700734     PISSN: 13596454     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.actamat.2006.10.008     Document Type: Article

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