Young's modulus, Poisson's ratio, and residual stress and strain in (111)-oriented scandium nitride thin films on silicon

Journal of Applied Physics

Volumn 100, Issue 2, 2006, Pages

  Moram, M A ^a   Barber, Z H ^a   Humphreys, C J ^a   Joyce, T B ^b   Chalker, P R ^b  

^a UNIVERSITY OF CAMBRIDGE   (United Kingdom)

^b UNIVERSITY OF LIVERPOOL   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

AMMONIA; ELASTIC MODULI; MOLECULAR BEAM EPITAXY; POISSON DISTRIBUTION; RESIDUAL STRESSES; SILICON; SURFACE ROUGHNESS; THIN FILMS; TWINNING;

COLUMNAR MORPHOLOGY; REACTIVE NITROGEN SOURCE; THERMAL CONTRACTION;

SCANDIUM COMPOUNDS;

EID: 33746816977     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2217106     Document Type: Article

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