Structure and optical properties of ScN thin films

Applied Surface Science

Volumn 175-176, Issue , 2001, Pages 499-504

  Bai, Xuewen ^a   Kordesch, M E ^a  

^a OHIO UNIVERSITY   (United States)

Author keywords

Bandgap; Refractive index; ScN

Indexed keywords

ENERGY GAP; EVAPORATION; FILM GROWTH; NITROGEN; QUARTZ; REFRACTIVE INDEX; SAPPHIRE; SILICON; SPUTTERING; SUBSTRATES; THIN FILMS;

ATOMIC NITROGEN SOURCE; REACTIVE SPUTTERING;

SEMICONDUCTING FILMS;

EID: 0035873302     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0169-4332(01)00165-9     Document Type: Article

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