UV-assisted thermal imprint of SU-8 using nickel mold

ICSMA 2008 - International Conference on Smart Manufacturing Application

Volumn , Issue , 2008, Pages 389-392

  Youn, Sung Won ^a   Ueno, Akihisa ^a   Takahashi, Masaharu ^a   Maeda, Ryutaro ^a  

^a NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY AIST   (Japan)

Author keywords

Micro pattern; Ni mold; SU 8; Surface pre treatment; UV assisted thermal imprint

Indexed keywords

ASPECT RATIO; CHEMICAL STABILITY; CURING; DRYING; FLOW CONTROL; MOLDS; NICKEL; NICKEL ALLOYS; PAINTING;

CHEMICAL-; EXPOSURE TIME; INTERNATIONAL CONFERENCES; MEMS DEVICES; MICRO PATTERN; MICRO PATTERNING; NI MOLD; SMART MANUFACTURING; SU-8; SU-8 RESISTS; SURFACE PRE-TREATMENT; U V LIGHT; UV IMPRINT; UV-ASSISTED THERMAL IMPRINT;

PHOTORESISTS;

EID: 50249128108     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ICSMA.2008.4505559     Document Type: Conference Paper

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