Three-dimensional SU-8 structures by reversal UV imprint

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 24, Issue 5, 2006, Pages 2225-2229

  Hu, W ^a,b   Yang, B ^a   Peng, C ^a   Pang, S W ^a  

^a UNIVERSITY OF MICHIGAN   (United States)

^b The University of Texas at Dallas   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

POLYMER SPIN COATING; SILANE COATING; THREE-DIMENSIONAL SU-8 MICROSTRUCTURES;

ADHESION; INTERFACIAL ENERGY; NANOSTRUCTURED MATERIALS; OXYGEN; SILANES; ULTRAVIOLET RADIATION;

MICROSTRUCTURE;

EID: 33749320935     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.2335431     Document Type: Article

References (11)

1. Y. Yang, S. Basu, D. L. Tomasko, L. J. Lee, and S. T. Yang, Biomaterials 26, 2585 (2005).
2. H. Kosaka, T. Kawashima, A. Tomita, M. Notomi, T. Tamamura, T. Sato, and S. Kawakami, Phys. Rev. B 58, 10096 (1998).
3. J. D. Meindl, J. A. Davis, P. Zarkesh-Ha, C. S. Patel, K. P. Martin, and P. A. Kohl, IBM J. Res. Dev. 46, 245 (2002).
4. J. Zaumseil, M. A. Meitl, J. W. P. Hsu, B. R. Acharya, K. W. Baldwin, Y. L. Loo, and J. A. Rogers, Nano Lett. 3, 1223 (2003).
5. X. D. Huang, L. R. Bao, X. Cheng, L. J. Guo, S. W. Pang, and A. F. Yee, J. Vac. Sci. Technol. B 20, 2872 (2002).
6. L. R. Bao, X. Cheng, X. D. Huang, L. J. Guo, S. W. Pang, and A. F. Yee, J. Vac. Sci. Technol. B 20, 2881 (2002).
7. Y. P. Kong, H. Y. Low, S. W. Pang, and A. F. Yee, J. Vac. Sci. Technol. B 22, 3251 (2004).
8. M. Agirregabiria, F. J. Blanco, J. Berganzo, M. T. Arroyo, A. Fullaondo, K. Mayora, and J. M. Ruano-Lopez, Lab Chip 5, 545 (2005).
9. D. K. Owens and R. C. Wendt, J. Appl. Polym. Sci. 13, 1741 (1969).
10. T. Yamamoto, M. Okubo, N. Imai, and Y. Mori, Plasma Chem. Plasma Process. 24, 1 (2004).
11. A. S. Holmes, Microsyst. Technol. 10, 357 (2004).