MEMS-based uncooled infrared focal plane arrays

TRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems

Volumn , Issue , 2007, Pages 1357-1360

  Kimata, Masafumi ^a  

^a RITSUMEIKAN UNIVERSITY   (Japan)

Author keywords

Infrared focal plane array; Microbolometer; SOI diode; Uncooled

Indexed keywords

ACTUATORS; FOCUSING; INFRARED DETECTORS; MACHINING; MEMS; MICROELECTROMECHANICAL DEVICES; MICROMACHINING; MICROSYSTEMS; PIXELS; SENSORS; TECHNOLOGY; TRANSDUCERS;

INFRARED FOCAL PLANE ARRAY; INTEGRATED MEMS; INTERNATIONAL CONFERENCES; MICROBOLOMETER; MICROMACHINING PROCESSING; NOISE-EQUIVALENT TEMPERATURE; PIXEL STRUCTURE; SOI DIODE; SOLID-STATE SENSORS; TWO TYPES; UNCOOLED; UNCOOLED INFRARED; UNCOOLED INFRARED FOCAL PLANE ARRAYS;

COMPOSITE MICROMECHANICS;

EID: 50049119932     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/SENSOR.2007.4300394     Document Type: Conference Paper

References (13)

1. C. Hanson et al., "Uncooled thermal imaging at Texas Instruments," Proc. SPIE, Vol. 1735, pp. 17-26, 1992.
2. R. A. Wood et al, "Integrated uncooled infrared detector imaging array," Tech. Digest IEEE Solid-State Sensor and Actuator Workshop, pp. 132-135, 1992.
3. T. Ishikawa et al, "Low-cost 320×240 uncooled IRFPA using conventional silicon IC process," Proc. SPIE, Vol. 3698, pp. 556-564 ,1999.
4. C. M. Hanson et al, "Uncooled infrared imaging using thin-film ferroelectrics," Proc. SPIE, Vol. 4288, pp. 298-303, 2001.
5. M. Hirota et al, "120×90 element thermopile array fabricated with CMOS technology," Proc. SPIE, Vol. 4820, pp. 239-429, 2003.
6. S. R. Hunter et al, "High-sensitivity uncooled microcantilever infrared imaging arrays," Proc. SPIE, Vol. 6206, pp. 62061J-1-11, 2006.
7. M. Wu et al, "Novel low-cost uncooled infrared camera," Proc. SPIE, Vol. 5783, pp. 496-505, 2005.
8. J. L. Tissot et al, "First demonstration of 640×480 uncooled amorphous silicon IRFPA with 25 μm pixel pitch," Proc. SPIE, Vol. 6206, pp. 620618-1-4, 2006.
9. V. N. Leonov et al, "Small two-dimensional and linear arrays of polycrystalline SiGe microbolometers at IMEC-XenICs," Proc. SPIE, Vol. 5074, pp. 446-457, 2003.
10. H. Wada et al, "YBaCuO uncooled microbolometer IRFPA," Sensors and Materials, Vol. 12, pp. 315-325, 2000.
11. D. Murphy et al, "High sensitivity 25 μm microbolometer FPAs," Proc. SPIE, Vol. 4820, pp. 208-219, 2003.
12. D. Murphy et al, "High sensitivity 640×512 (20 μm pitch) microbolometer FPAs," Proc. SPIE, Vol. 6206, pp. 62021A-1-14, 2006.
13. M. Ueno et al, "640×480 pixel uncooled infrared FPA with SOI diode detectors," Proc. SPIE, Vol. 5783, pp. 567-577, 2005.