The contribution of grain boundary barriers to the electrical conductivity of titanium oxide thin films

Applied Physics Letters

Volumn 93, Issue 6, 2008, Pages

  Martin, Nicolas ^a   Besnard, Auŕlien ^a   Sthal, Fabrice ^a   Vaz, Filipe ^b   Nouveau, Corinne ^c  

^a FEMTO ST INSTITUTE   (France)

^b UNIVERSITY OF MINHO   (Portugal)

^c ENSAM   (France)

Author keywords

[No Author keywords available]

Indexed keywords

ARRHENIUS PLOTS; ATOMIC PHYSICS; ATOMS; CONCENTRATION (PROCESS); CRYSTAL GROWTH; ELECTRIC CONDUCTIVITY; ELECTRIC CONDUCTIVITY OF SOLIDS; GRAIN (AGRICULTURAL PRODUCT); GRAIN BOUNDARIES; GRAIN SIZE AND SHAPE; INJECTION (OIL WELLS); MAGNETRON SPUTTERING; NONMETALS; OXIDE FILMS; OXYGEN; REACTIVE SPUTTERING; SPUTTER DEPOSITION; THICK FILMS; THIN FILMS; TITANIUM; TITANIUM OXIDES;

ARRHENIUS; ATOMIC RATIOS; CONDUCTION MECHANISMS; DEPOSITION PROCESSING; ELECTRICAL CONDUCTIVITY; GRAIN BARRIERS; GRAIN-BOUNDARY BARRIERS; GRAIN-BOUNDARY SCATTERING; OXYGEN CONCENTRATIONS; OXYGEN INJECTION; REACTIVE GASES; REACTIVE MAGNETRON SPUTTERING; SOLID STATES; TITANIUM OXIDE THIN FILMS; TRANSPORT MODELLING;

GAS PERMEABLE MEMBRANES;

EID: 49749103210     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2970034     Document Type: Article

References (18)

1. G. Reiss, J. Vancea, and H. Hoffman, Phys. Rev. Lett. 56, 2100 (1986).
2. J. Y. W. Seto, J. Appl. Phys. 46, 5247 (1975).
3. J. H. Werner, Solid State Phenom. 37, 213 (1994).
4. N. Martin, A. R. Bally, P. Hones, R. Sanjiǹs, and F. Ĺvy, Thin Solid Films 377, 550 (2000).
5. N. Martin, J. Lintymer, J. Gavoille, J. M. Chapṕ, F. Sthal, J. Takadoum, F. Vaz, and L. Rebouta, Surf. Coat. Technol. 201, 7720 (2007).
6. N. Martin, J. Lintymer, J. Gavoille, J. M. Chapṕ, F. Sthal, J. Takadoum, F. Vaz, and L. Rebouta, Surf. Coat. Technol. 201, 7727 (2007).
7. N. Martin, J. Lintymer, J. Gavoille, J. M. Chapṕ, F. Sthal, J. Takadoum, F. Vaz, and L. Rebouta, Surf. Coat. Technol. 201, 7733 (2007).
8. O. Banakh, P. E. Schmid, R. Sanjiǹs, and F. Ĺvy, Surf. Coat. Technol. 151, 272 (2002).
9. J. H. Mooij, Phys. Status Solidi A 17, 521 (1973).
10. D. S. MacLachlan, Phys. Rev. B 25, 2285 (1982).
11. A. R. Bally, E. N. Korobeinikova, P. E. Schmid, F. Ĺvy, and F. Bussy, J. Phys. D: Appl. Phys. 31, 1149 (1998).
12. S. Seeger, R. Mientus, J. Röhrich, E. Strub, W. Bohne, and K. Ellmer, Surf. Coat. Technol. 200, 218 (2005).
13. B. Ouertani, J. Ouerfelli, M. Saadoun, B. Bessas, H. Ezzaouia, J. C. Berǹde, Mater. Charact. 54, 431 (2005).
14. J. R. Ares, A. Pascual, I. J. Ferrer, and C. R. Sanchez, Thin Solid Films 451, 233 (2004).
15. H. Tang, K. Prasad, R. Sanjiǹs, P. E. Schmid, and F. Ĺvy, J. Appl. Phys. 74, 2042 (1994).
16. D. Mercs, F. Lapostolle, F. Perry, A. Billard, and C. Frantz, Surf. Coat. Technol. 116, 916 (1999).
17. E. K. Kim, M. H. Son, S. K. Min, Y. K. Han, C. H. Wang, and S. S. Yom, J. Appl. Phys. 79, 4459 (1996).
18. H. Tang, F. Ĺvy, H. Berger, and P. E. Schmid, Phys. Rev. B 52, 7771 (1995).