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Surface and Coatings Technology

Volumn 200, Issue 1-4 SPEC. ISS., 2005, Pages 218-221

Electrical and optical properties of highly (001) textured WSX films deposited by reactive magnetron sputtering

(6) Seeger, S a Mientus, R b Rohrich J a Strub, E a Bohne, W a Ellmer, K a

a HAHN MEITNER INSTITUT (Germany)

b Optotransmitter Umweltschutz T (Germany)

Author keywords

Conductivity; Energy dispersive X ray diffraction; Magnetron sputtering; Tungsten disulfide

Indexed keywords

ELECTRIC PROPERTIES; ENERGY DISPERSIVE SPECTROSCOPY; FILM PREPARATION; MAGNETRON SPUTTERING; OPTICAL PROPERTIES; POLYCRYSTALLINE MATERIALS; PRESSURE EFFECTS; SPUTTER DEPOSITION; TEXTURES; THERMAL CONDUCTIVITY; TUNGSTEN COMPOUNDS; X RAY DIFFRACTION ANALYSIS;

REACTIVE MAGNETRON SPUTTERING; SPUTTERING PRESSURES; TEMPERATURE DEPENDENT CONDUCTIVITY; TUNGSTEN DISULFIDE;

INORGANIC COATINGS;

SPUTTERING;

EID: 24644519880 PISSN: 02578972 EISSN: None Source Type: Journal
DOI: 10.1016/j.surfcoat.2005.02.050 Document Type: Article

Times cited : (14)

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