Measured radial dependence of the peak sheath voltages present in very high frequency capacitive discharges

Applied Physics Letters

Volumn 90, Issue 20, 2007, Pages

  Barnat, E V ^a   Miller, P A ^a   Hebner, G A ^a   Paterson, A M ^b   Panagopoulos, Theodoros ^b   Hammond, Edward ^b   Holland, J ^b  

^a SANDIA NATIONAL LABORATORIES   (United States)

^b APPLIED MATERIALS INC   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ARGON PLASMA DISCHARGE; EXCITATION RADIO FREQUENCY;

ELECTRIC DISCHARGES; ELECTRODES; PRESSURE EFFECTS;

ELECTRIC POTENTIAL;

EID: 34249004684     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2735934     Document Type: Article

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